JPH0166747U - - Google Patents
Info
- Publication number
- JPH0166747U JPH0166747U JP1987162430U JP16243087U JPH0166747U JP H0166747 U JPH0166747 U JP H0166747U JP 1987162430 U JP1987162430 U JP 1987162430U JP 16243087 U JP16243087 U JP 16243087U JP H0166747 U JPH0166747 U JP H0166747U
- Authority
- JP
- Japan
- Prior art keywords
- backscattered electron
- detection device
- faraday cup
- backscattered
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 description 1
Description
第１図は本案の一実施例を示す断面図である。
１……電子線、２……対物レンズ、３……試料
、４……反射電子信号、５……反射電子検出器、
６……フアラデイーカツプ、７……可動軸、８…
…絶縁軸、９……ストツプ溝、１０……ツマミ、
１１……フランジ、１２……クイクストツプボー
ル。
FIG. 1 is a sectional view showing an embodiment of the present invention. 1... Electron beam, 2... Objective lens, 3... Sample, 4... Backscattered electron signal, 5... Backscattered electron detector,
6... Faraday cup, 7... Movable axis, 8...
...Insulated shaft, 9...Stop groove, 10...Knob,
11...flange, 12...quick stop ball.
Claims (1)
観察する走査形電子顕微鏡の反射電子検出装置に
おいて、反射電子検出器を出し入れする機構にフ
アラデイーカツプを設けた構造を有することを特
徴とする反射電子検出装置。 ２ 請求の範囲第１項において、反射電子検出器
及びフアラデイーカツプ設定位置は真空外より設
定できる構造を有することを特徴とする反射電子
検出装置。[Scope of Claim for Utility Model Registration] 1. In a backscattered electron detection device for a scanning electron microscope that detects backscattered electron signals generated from a sample and observes images, a Faraday cup is provided in the mechanism for inserting and removing the backscattered electron detector. A backscattered electron detection device characterized by having a structure. 2. A backscattered electron detection device according to claim 1, characterized in that the backscattered electron detector and Faraday cup setting position have a structure that can be set from outside a vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162430U JPH0166747U (en) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162430U JPH0166747U (en) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0166747U true JPH0166747U (en) | 1989-04-28 |
Family
ID=31446248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162430U Pending JPH0166747U (en) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0166747U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165438A (en) * | 1989-11-24 | 1991-07-17 | Nippon Denshi Tekunikusu Kk | Charged particle beam device |
-
1987
- 1987-10-26 JP JP1987162430U patent/JPH0166747U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165438A (en) * | 1989-11-24 | 1991-07-17 | Nippon Denshi Tekunikusu Kk | Charged particle beam device |
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