JPH0364462U - - Google Patents
Info
- Publication number
- JPH0364462U JPH0364462U JP12526889U JP12526889U JPH0364462U JP H0364462 U JPH0364462 U JP H0364462U JP 12526889 U JP12526889 U JP 12526889U JP 12526889 U JP12526889 U JP 12526889U JP H0364462 U JPH0364462 U JP H0364462U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- tilting
- vertical movement
- optical axis
- aperture plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Description
添付図面は本考案に係る試料傾斜装置の一実施
例を示す構成概略図である。
１，２……対物レンズの上磁極片、下磁極片、
３……試料、４……絞り板、５……試料傾斜機構
、６……駆動機構、７……駆動回路、８ａ，８ｂ
……操作スイツチ、９……試料上下動機構、１０
……Ｚ−θ変換回路、１１……比較回路。
The accompanying drawing is a schematic diagram showing an embodiment of the sample tilting device according to the present invention. 1, 2... Upper magnetic pole piece, lower magnetic pole piece of the objective lens,
3...Sample, 4...Aperture plate, 5...Sample tilting mechanism, 6...Drive mechanism, 7...Drive circuit, 8a, 8b
...Operation switch, 9...Sample vertical movement mechanism, 10
...Z-θ conversion circuit, 11...comparison circuit.
Claims (1)
斜手段と、該試料傾斜手段と共に試料を電子線の
光軸に沿つて上下動させるための試料上下動手段
と、対物レンズの絞り板とを備え、前記試料上下
動手段による試料の光軸上における位置を検出す
る試料位置検出手段を設け、該試料位置検出手段
からの位置信号に基づいて前記試料が絞り板と衝
突するのを防止する最大許容傾斜角を求めるため
の手段を設け、該手段からの最大許容傾斜角に対
応する信号に基づいて前記試料傾斜装置の傾斜角
を制限するための手段を設けてなる電子顕微鏡に
おける試料傾斜装置。 A sample tilting means for tilting the sample with respect to the electron beam, a sample vertical movement means for moving the sample up and down along the optical axis of the electron beam together with the sample tilting means, and an aperture plate of an objective lens. , a sample position detection means for detecting the position of the sample on the optical axis by the sample vertical movement means is provided, and a maximum permissible limit is provided for preventing the sample from colliding with the aperture plate based on a position signal from the sample position detection means. A specimen tilting device for an electron microscope, comprising means for determining a tilting angle, and means for limiting the tilting angle of the specimen tilting device based on a signal from the means corresponding to a maximum allowable tilting angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12526889U JPH0364462U (en) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12526889U JPH0364462U (en) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0364462U true JPH0364462U (en) | 1991-06-24 |
Family
ID=31673147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12526889U Pending JPH0364462U (en) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0364462U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52120758A (en) * | 1976-04-05 | 1977-10-11 | Hitachi Ltd | Electronic microscope |
| JPS5413765A (en) * | 1977-07-04 | 1979-02-01 | Jeol Ltd | Sample slanting equipment of scanning electron microscope or the like |
| JPS61220256A (en) * | 1985-03-27 | 1986-09-30 | Hitachi Ltd | Sample fine movement device |
-
1989
- 1989-10-26 JP JP12526889U patent/JPH0364462U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52120758A (en) * | 1976-04-05 | 1977-10-11 | Hitachi Ltd | Electronic microscope |
| JPS5413765A (en) * | 1977-07-04 | 1979-02-01 | Jeol Ltd | Sample slanting equipment of scanning electron microscope or the like |
| JPS61220256A (en) * | 1985-03-27 | 1986-09-30 | Hitachi Ltd | Sample fine movement device |
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