JPH0169731U - - Google Patents
Info
- Publication number
- JPH0169731U JPH0169731U JP1987165256U JP16525687U JPH0169731U JP H0169731 U JPH0169731 U JP H0169731U JP 1987165256 U JP1987165256 U JP 1987165256U JP 16525687 U JP16525687 U JP 16525687U JP H0169731 U JPH0169731 U JP H0169731U
- Authority
- JP
- Japan
- Prior art keywords
- container body
- container
- lid
- packing
- adjustment part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012856 packing Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Closures For Containers (AREA)
- Packaging Frangible Articles (AREA)
- Casings For Electric Apparatus (AREA)
Description
第１図はこの考案の一実施例である半導体ウエ
ハをキヤリアに保持して収納する密閉容器の斜視
図、第２図はその断面図、第３図は従来の半導体
ウエハをキヤリアに保持して収納する密閉容器の
断面図である。
１０……容器本体、１１……蓋体、１２……パ
ツキング、１３……ロツク機構、１４……圧力調
整部。
Fig. 1 is a perspective view of an airtight container in which a semiconductor wafer is held and stored in a carrier, which is an embodiment of this invention, Fig. 2 is a sectional view thereof, and Fig. 3 is a conventional case in which a semiconductor wafer is held in a carrier. FIG. 3 is a sectional view of a closed container for storing the product. DESCRIPTION OF SYMBOLS 10... Container body, 11... Lid body, 12... Packing, 13... Lock mechanism, 14... Pressure adjustment part.
Claims (1)
の間にパツキングを介在させてこれら容器本体と
蓋体とをロツク機構により一体に固定することに
より内部を気密に保つ容器に内外の圧力差により
弾性変形する圧力調整部を設けたことを特徴とす
る密閉容器。 Packing is interposed between the container body and the lid that covers the opening of the container body, and the container body and lid are fixed together by a locking mechanism, thereby preventing pressure differences between the inside and outside of the container to keep the inside airtight. A closed container characterized by being provided with a pressure adjustment part that is elastically deformed by.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165256U JPH0169731U (en) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987165256U JPH0169731U (en) | 1987-10-30 | 1987-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0169731U true JPH0169731U (en) | 1989-05-09 |
Family
ID=31451574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987165256U Pending JPH0169731U (en) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0169731U (en) |
-
1987
- 1987-10-30 JP JP1987165256U patent/JPH0169731U/ja active Pending