JPH0173937U - - Google Patents

Info

Publication number
JPH0173937U
JPH0173937U JP1987167937U JP16793787U JPH0173937U JP H0173937 U JPH0173937 U JP H0173937U JP 1987167937 U JP1987167937 U JP 1987167937U JP 16793787 U JP16793787 U JP 16793787U JP H0173937 U JPH0173937 U JP H0173937U
Authority
JP
Japan
Prior art keywords
elastic member
fork
transfer device
wafer transfer
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987167937U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987167937U priority Critical patent/JPH0173937U/ja
Publication of JPH0173937U publication Critical patent/JPH0173937U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例のウエハ搬送装置の
側面図、第２図は弾性部材の硬度とウエハ裏面の
静止摩擦係数の関係を示す図、第３図は弾性部材
の硬度とウエハ裏面の異物付着数の関係を示す図
、第４図は従来のフオークによるウエハ搬送装置
を説明する斜視外観図である。 ２…フオーク、３…弾性部材、５，６…エアー
シリンダ。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ ウエハを１枚単位でフオーク上に載せて搬送
    するウエハ搬送装置において、硬度が５０〜６５
    の範囲の弾性部材をフオーク上に設けたことを特
    徴とするウエハ搬送装置。 ２ 前記弾性部材がシリコンゴムまたはウレタン
    ゴムである特許請求の範囲第１項記載のウエハ搬
    送装置。
JP1987167937U 1987-11-04 1987-11-04 Pending JPH0173937U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987167937U JPH0173937U (ja) 1987-11-04 1987-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987167937U JPH0173937U (ja) 1987-11-04 1987-11-04

Publications (1)

Publication Number Publication Date
JPH0173937U true JPH0173937U (ja) 1989-05-18

Family

ID=31456678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987167937U Pending JPH0173937U (ja) 1987-11-04 1987-11-04

Country Status (1)

Country Link
JP (1) JPH0173937U (ja)

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