JPH0175957U - - Google Patents

Info

Publication number
JPH0175957U
JPH0175957U JP1987171056U JP17105687U JPH0175957U JP H0175957 U JPH0175957 U JP H0175957U JP 1987171056 U JP1987171056 U JP 1987171056U JP 17105687 U JP17105687 U JP 17105687U JP H0175957 U JPH0175957 U JP H0175957U
Authority
JP
Japan
Prior art keywords
ion
rotating shaft
implantation device
support plate
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987171056U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987171056U priority Critical patent/JPH0175957U/ja
Publication of JPH0175957U publication Critical patent/JPH0175957U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例のイオン供給部の断
面図、第２図は従来のイオン注入装置の構成図、
第３図は第１図の回転支持板の平面図である。 １１，１２，１３：イオン源、２：イオン、３
：引出し電極、３１：電磁石、４：真空容器、５
：支持板、５１：回転軸、６：電源。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空容器内の回転支持板上の回転軸を中心とし
    た円周上に複数のイオン源が配置され、各イオン
    源に対する配線および配管が回転軸を通り、一つ
    のイオン分離部を引出し電極を介して各イオン源
    のイオン放出口に対向可能に備えたことを特徴と
    するイオン注入装置。
JP1987171056U 1987-11-09 1987-11-09 Pending JPH0175957U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987171056U JPH0175957U (ja) 1987-11-09 1987-11-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987171056U JPH0175957U (ja) 1987-11-09 1987-11-09

Publications (1)

Publication Number Publication Date
JPH0175957U true JPH0175957U (ja) 1989-05-23

Family

ID=31462540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987171056U Pending JPH0175957U (ja) 1987-11-09 1987-11-09

Country Status (1)

Country Link
JP (1) JPH0175957U (ja)

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