JPH0177175U

JPH0177175U -

Info

Publication number: JPH0177175U
Application number: JP1987172376U
Authority: JP
Priority date: 1987-11-11
Filing date: 1987-11-11
Publication date: 1989-05-24

Description

[Brief explanation of the drawing]

第１図は本考案による実施例の流体・流量制御
バルブの縦断面図、第２図は第１図の平面図、第
３図は第１図のＡ―Ａ断面図、第４図は本考案に
よる他の実施例の流体・流量制御バルブ。第５図
の従来例の流体流量制御バルブの縦断面図である
。１……バルブ本体、２……円筒状部材、３……
弁座、６……垂直流路、７……ダイヤフラム、８
……積層型圧電素子、９……ダイヤフラム押え、
１０……流体室、１２……弁棒、１５……弁体、
１１……ナツト部材、１３……復帰ばね、１４…
…押圧ばね、１７……調節ねじ、１８……ナツト
。 Fig. 1 is a longitudinal sectional view of a fluid/flow rate control valve according to an embodiment of the present invention, Fig. 2 is a plan view of Fig. 1, Fig. 3 is a sectional view taken along line AA of Fig. 1, and Fig. 4 is a main view of the present invention. Another embodiment of the fluid/flow control valve according to the invention. FIG. 6 is a longitudinal sectional view of the conventional example fluid flow control valve of FIG. 5; 1... Valve body, 2... Cylindrical member, 3...
Valve seat, 6... Vertical flow path, 7... Diaphragm, 8
...Laminated piezoelectric element, 9...Diaphragm holder,
10...Fluid chamber, 12...Valve stem, 15...Valve body,
11... Nut member, 13... Return spring, 14...
...pressure spring, 17...adjustment screw, 18...nut.

Claims

[Scope of utility model registration request]

A valve body having an inlet port and an outlet port on the left and right sides, a vertical flow channel communicating with each of the inlet and outlet ports in the center, and a fluid chamber with an open top above the vertical flow channel, and a valve body mounted on a side wall stepped portion of the fluid chamber of the valve body. A thin plate diaphragm, a ring-shaped diaphragm holder that presses the outer circumference of the upper surface of this diaphragm,
A cylindrical member that presses the outer periphery of the upper surface of the diaphragm presser, stands upright on the upper surface of the valve body, and has an inner diameter of the upper part smaller than the inner diameter of the lower part of the middle part, the uppermost part is a male threaded head, and the upper part is a male threaded part. The middle part and the lower part are columnar, and the lower part and the middle part are housed in the cylindrical member, a part of the upper male thread part protrudes from the upper end surface of the cylindrical member, and the lower part passes through the diaphragm retainer to form the lower end surface. The valve stem is in contact with the central part of the diaphragm and is screwed into the male thread on the upper part of the valve stem, so that the upper part of the outer peripheral surface is slidably fitted into the inner diameter surface of the upper part of the cylindrical member, and the lower part of the outer peripheral surface has a large diameter. a nut member having a stepped portion; a cylindrical laminated piezoelectric element provided between the upper surface of the diaphragm presser and a lower end surface of the nut member; a stepped portion on the inner peripheral surface of the cylindrical member and the nut member; 1. A fluid flow rate control valve comprising: a pressure spring clamped between a stepped portion on an outer circumferential surface of the valve;