JPH0177249U - - Google Patents
Info
- Publication number
- JPH0177249U JPH0177249U JP1987172461U JP17246187U JPH0177249U JP H0177249 U JPH0177249 U JP H0177249U JP 1987172461 U JP1987172461 U JP 1987172461U JP 17246187 U JP17246187 U JP 17246187U JP H0177249 U JPH0177249 U JP H0177249U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- mounting bracket
- current introduction
- introduction terminal
- guide groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例に係るフイラメ
ント取付構造を示す斜視図である。第２図は、バ
ケツト型イオン源の一例を示す概略断面図である
。第３図は、従来のフイラメント取付構造の一例
を示す斜視図である。
２……プラズマ生成容器、４……電流導入端子
、６……フイラメント、２０……取付金具、２０
３……凹部、２２……押え板、２２１……ガイド
溝、２６……固定ねじ。
FIG. 1 is a perspective view showing a filament mounting structure according to an embodiment of this invention. FIG. 2 is a schematic cross-sectional view showing an example of a bucket-type ion source. FIG. 3 is a perspective view showing an example of a conventional filament mounting structure. 2... Plasma generation container, 4... Current introduction terminal, 6... Filament, 20... Mounting bracket, 20
3... recess, 22... presser plate, 221... guide groove, 26... fixing screw.
Claims (1)
た電流導入端子に熱電子放出用のフイラメントを
取付ける構造において、前記電流導入端子の先端
部が入る凹部を有する取付金具を電流導入端子の
先端部に被せて取付け、そしてフイラメント用の
ガイド溝を有する押え板およびそれを前記取付金
具に締付ける固定ねじであつて共に金属製のもの
を用いて、押え板のガイド溝部と取付金具間にフ
イラメントの端部を挟み込んで固定するようにし
たことを特徴とするイオン源のフイラメント取付
構造。 In a structure in which a filament for thermionic emission is attached to a current introduction terminal inserted and fixed in a plasma generation container of an ion source, a mounting bracket having a recess into which the tip of the current introduction terminal fits is placed over the tip of the current introduction terminal. Then, using a holding plate having a guide groove for the filament and a fixing screw that fastens it to the mounting bracket, both of which are made of metal, secure the end of the filament between the guide groove of the holding plate and the mounting bracket. A filament mounting structure for an ion source characterized by being fixed by being sandwiched.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172461U JPH0177249U (en) | 1987-11-11 | 1987-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172461U JPH0177249U (en) | 1987-11-11 | 1987-11-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0177249U true JPH0177249U (en) | 1989-05-24 |
Family
ID=31464432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172461U Pending JPH0177249U (en) | 1987-11-11 | 1987-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0177249U (en) |
-
1987
- 1987-11-11 JP JP1987172461U patent/JPH0177249U/ja active Pending
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