JPH0177258U

JPH0177258U -

Info

Publication number: JPH0177258U
Application number: JP1987172644U
Authority: JP
Priority date: 1987-11-13
Filing date: 1987-11-13
Publication date: 1989-05-24

Description

[Brief explanation of the drawing]

第１図は従来の電磁石を微動する質量分析計を
示す図、第２図は従来の電磁石を固定し、その代
りにハウジング全体を可動にする方式を示す図、
第３図は本案の電磁石、ハウジングを固定にし、
その代りに可変スリツトを可動させる方式を示す
図、第４図は本案の可変スリツト可動機構を示す
図である。１……イオン源、２……イオンビーム、３……
電磁石、４……微動機構、５……可変スリツト、
６……検知器、７……分析管、８……ハウジング
、１０……可動フランジ、１１Ａ，１１Ｂ……Ｏ
リング、１２……コロ状ベアリング、１３……ガ
イドワク。 Figure 1 shows a conventional mass spectrometer that moves an electromagnet slightly; Figure 2 shows a conventional system in which the electromagnet is fixed and the entire housing is movable;
Figure 3 shows the proposed electromagnet, with the housing fixed,
A diagram showing a method of moving the variable slit instead, and FIG. 4 is a diagram showing the variable slit moving mechanism of the present invention. 1...Ion source, 2...Ion beam, 3...
Electromagnet, 4... fine movement mechanism, 5... variable slit,
6...Detector, 7...Analysis tube, 8...Housing, 10...Movable flange, 11A, 11B...O
Ring, 12... Rolled bearing, 13... Guide work.

Claims

[Scope of utility model registration request]

An ion source that ionizes and accelerates the sample, an electromagnet that applies a magnetic field under vacuum and analyzes the ions based on their mass difference, and a slit with a variable opening width installed near the beam convergence point to detect ions. 1. A mass spectrometer equipped with a detector, characterized in that the variable slit has a mechanism that allows it to move slightly in parallel to the beam traveling direction, and the slit can be moved to a beam convergence point.