JPH0177838U - - Google Patents
Info
- Publication number
- JPH0177838U JPH0177838U JP1987171464U JP17146487U JPH0177838U JP H0177838 U JPH0177838 U JP H0177838U JP 1987171464 U JP1987171464 U JP 1987171464U JP 17146487 U JP17146487 U JP 17146487U JP H0177838 U JPH0177838 U JP H0177838U
- Authority
- JP
- Japan
- Prior art keywords
- grounded electrode
- guide roller
- plasma processing
- processed
- adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004744 fabric Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図は本考案のプラズマ処理装置の処理容器
の全体図であり、１はガイドローラー、２はガイ
ドローラー位置調節用長孔、３は凸面状の非接地
電極、４は３と対面する凹面状の接地電極、５は
被処理物（布）、６，７は被処理物の送り出し、
又は巻き取りローラー、８は被処理物のガイドロ
ーラー又はテンシヨン調節用ローラー、９はプラ
ズマ処理用のガスの導入孔、１０は真空ポンプに
通じる排気孔、１１は真空容器、１２はアースを
示す。
FIG. 1 is an overall view of the processing chamber of the plasma processing apparatus of the present invention, in which 1 is a guide roller, 2 is a long hole for adjusting the position of the guide roller, 3 is a convex non-grounded electrode, and 4 is a concave surface facing 3. 5 is a workpiece (cloth), 6 and 7 are sending out the workpiece,
or a winding roller; 8 is a guide roller or tension adjustment roller for the object to be processed; 9 is an inlet for gas for plasma processing; 10 is an exhaust hole leading to a vacuum pump; 11 is a vacuum container; and 12 is a ground.
Claims (1)
面状の接地電極４と、非接地電極に任意の角度で
被処理物５を接触させることのできるガイドロー
ラー群１、及びガイドローラーの位置を調節する
為の手段２とを具有せしめていることを特徴とす
るプラズマ処理装置。 A convex non-grounded electrode 3, a concave grounded electrode 4, a guide roller group 1 that can bring the object to be processed 5 into contact with the non-grounded electrode at any angle in the vacuum container 11, and the positions of the guide rollers. A plasma processing apparatus characterized in that it comprises means 2 for adjusting.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171464U JPH0177838U (en) | 1987-11-10 | 1987-11-10 | |
| US07/214,179 US4968918A (en) | 1987-07-06 | 1988-07-01 | Apparatus for plasma treatment |
| EP88110707A EP0298420B1 (en) | 1987-07-06 | 1988-07-05 | Apparatus for plasma treatment |
| DE3887933T DE3887933T2 (en) | 1987-07-06 | 1988-07-05 | Plasma processing device. |
| KR1019880008345A KR950001541B1 (en) | 1987-07-06 | 1988-07-06 | Plasma treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171464U JPH0177838U (en) | 1987-11-10 | 1987-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0177838U true JPH0177838U (en) | 1989-05-25 |
Family
ID=31463319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171464U Pending JPH0177838U (en) | 1987-07-06 | 1987-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0177838U (en) |
-
1987
- 1987-11-10 JP JP1987171464U patent/JPH0177838U/ja active Pending