JPH0179258U - - Google Patents
Info
- Publication number
- JPH0179258U JPH0179258U JP1987173773U JP17377387U JPH0179258U JP H0179258 U JPH0179258 U JP H0179258U JP 1987173773 U JP1987173773 U JP 1987173773U JP 17377387 U JP17377387 U JP 17377387U JP H0179258 U JPH0179258 U JP H0179258U
- Authority
- JP
- Japan
- Prior art keywords
- excitation coil
- magnetic path
- lens
- objective lens
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Landscapes
- Gasket Seals (AREA)
Description
第１図は本案の一実施例を説明するための透過
形電子顕微鏡の対物レンズの縦断面図、第２図は
本案に関する部品の構造図、第３図は対物レンズ
の半縦断面図、第４図は接続部の詳細図である。
１……上磁路、２……下磁路、３……励磁コイ
ル、４……コイル枠、５……熱遮断容器、５ａ…
…外筒部、６……高真空、７，１７，１８，２１
，２２，２５……ロリングパツキング、８……対
物レンズポールピース、９……試料台、１０……
試料装置、１０ａ，１０ｂ……試料、１１……非
磁性の部材、１２……サイドエントリー試料装置
、１３……水冷管、１４，１５……防振ゴム、１
６ａ……入水管、１６ｂ……排水管、１９……端
子棒、２０……電気絶縁ブツシユ、２３……熱遮
断フタ、２４……真空排気管、２６……空間。
Fig. 1 is a longitudinal cross-sectional view of an objective lens of a transmission electron microscope for explaining an embodiment of the present invention, Fig. 2 is a structural diagram of parts related to the present invention, Fig. 3 is a half-vertical cross-sectional view of the objective lens, Figure 4 is a detailed diagram of the connection section. DESCRIPTION OF SYMBOLS 1... Upper magnetic path, 2... Lower magnetic path, 3... Excitation coil, 4... Coil frame, 5... Heat shielding container, 5a...
...Outer cylinder part, 6...High vacuum, 7, 17, 18, 21
, 22, 25... Rolling packing, 8... Objective lens pole piece, 9... Sample stage, 10...
Sample device, 10a, 10b... Sample, 11... Non-magnetic member, 12... Side entry sample device, 13... Water cooling tube, 14, 15... Vibration isolating rubber, 1
6a... Water inlet pipe, 16b... Drain pipe, 19... Terminal bar, 20... Electric insulation bushing, 23... Heat shielding lid, 24... Vacuum exhaust pipe, 26... Space.
Claims (1)
より成る励磁コイルを設けた電子レンズにおいて
、該励磁コイルのほぼ全周を真空の空間で覆うよ
うにしたことを特徴とする電子顕微鏡等の電子レ
ンズ。 An electron microscope, etc., characterized in that the magnetic path is divided into two or more parts and an excitation coil made of a coil frame is provided inside the electron lens, in which almost the entire circumference of the excitation coil is covered with a vacuum space. electronic lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987173773U JPH0179258U (en) | 1987-11-16 | 1987-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987173773U JPH0179258U (en) | 1987-11-16 | 1987-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0179258U true JPH0179258U (en) | 1989-05-29 |
Family
ID=31465665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987173773U Pending JPH0179258U (en) | 1987-11-16 | 1987-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0179258U (en) |
-
1987
- 1987-11-16 JP JP1987173773U patent/JPH0179258U/ja active Pending
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