JPH0180467U - - Google Patents
Info
- Publication number
- JPH0180467U JPH0180467U JP1987176697U JP17669787U JPH0180467U JP H0180467 U JPH0180467 U JP H0180467U JP 1987176697 U JP1987176697 U JP 1987176697U JP 17669787 U JP17669787 U JP 17669787U JP H0180467 U JPH0180467 U JP H0180467U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser light
- marking
- laser oscillator
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Thermal Transfer Or Thermal Recording In General (AREA)
Description
第１図は本考案の実施例１のシステム構成図、
第２図は第１図のシステムによつてレーザマーク
された半導体製品を示す図、第３図は本考案の実
施例２のシステム構成図、第４図は第２図のシス
テムによつてレーザマークされた半導体製品を示
す図である。
１……レーザ発振器、２……時分割光路切替部
、３ａ，３ｂ……フアイバ部、４ａ，４ｂ……照
射部、５ａ，５ｂ……マスク部。
FIG. 1 is a system configuration diagram of Embodiment 1 of the present invention.
2 is a diagram showing a semiconductor product laser marked by the system shown in FIG. 1, FIG. 3 is a system configuration diagram of the second embodiment of the present invention, and FIG. FIG. 3 is a diagram showing marked semiconductor products. DESCRIPTION OF SYMBOLS 1... Laser oscillator, 2... Time-division optical path switching section, 3a, 3b... Fiber section, 4a, 4b... Irradiation section, 5a, 5b... Mask section.
Claims (1)
ークする装置において、前記印字パターンを複数
に分割した個々のパターン領域毎にレーザ光を照
射する複数の照射部と、レーザ発振器からのレー
ザ光を前記照射部に順次切替える光路切替部とを
有することを特徴とするレーザマーク装置。 A device for marking printed patterns such as product names and standards on semiconductor products includes a plurality of irradiation units that irradiate laser light to individual pattern areas obtained by dividing the printed pattern into a plurality of parts, and a laser oscillator that irradiates the laser light from a laser oscillator. What is claimed is: 1. A laser marking device comprising: an optical path switching section that sequentially switches between the two sections.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176697U JPH0180467U (en) | 1987-11-19 | 1987-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176697U JPH0180467U (en) | 1987-11-19 | 1987-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0180467U true JPH0180467U (en) | 1989-05-30 |
Family
ID=31468411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987176697U Pending JPH0180467U (en) | 1987-11-19 | 1987-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0180467U (en) |
-
1987
- 1987-11-19 JP JP1987176697U patent/JPH0180467U/ja active Pending
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