JPH0180754U - - Google Patents
Info
- Publication number
- JPH0180754U JPH0180754U JP1987152538U JP15253887U JPH0180754U JP H0180754 U JPH0180754 U JP H0180754U JP 1987152538 U JP1987152538 U JP 1987152538U JP 15253887 U JP15253887 U JP 15253887U JP H0180754 U JPH0180754 U JP H0180754U
- Authority
- JP
- Japan
- Prior art keywords
- micro
- positioning mechanism
- electrode
- piezoelectric element
- detection probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
第１図は本考案の第１実施例の微小位置決め機
構を示す斜視図、第２図は３次元動作用円すい微
動素子体を示す斜視図、第３図ａ及び第３図ｂは
３次元動作用円すい微動素子体の電極配置展開平
面図、第４図は第１実施例の微小位置決め機構を
用いたユニツトを示す側面図、第５図は第２実施
例の微小位置決め機構を用いたユニツトを示す側
面図、第６図は従来の微小位置決め機構の周波数
特性を示す説明図、第７図は中空円すい状微小位
置決め機構の周波数特性を示す説明図、第８図ａ
及び第８図ｂは中空円すい状微動素子体の曲げ動
作を示す断面図である。
１１，１２，１３……中空円すい状微動素子体
、２……絶縁材、３……検出探針台、４……検出
探針ホルダー、５……検出探針、６……内側共通
電極（ＧＮＤ）、７１，７２……ｘ軸動作用電極
、８１，８２……ｙ軸動作用電極、９……ｚ軸動
作用電極、１０……試料台、１１……試料、１２
……箱体、１３……継手、１４……送り機構。
Fig. 1 is a perspective view showing a micro positioning mechanism according to the first embodiment of the present invention, Fig. 2 is a perspective view showing a conical fine movement element body for three-dimensional movement, and Figs. 3a and 3b are views for three-dimensional movement. FIG. 4 is a side view showing a unit using the micro-positioning mechanism of the first embodiment, and FIG. 5 is a plan view of a unit using the micro-positioning mechanism of the second embodiment. FIG. 6 is an explanatory diagram showing the frequency characteristics of a conventional micro-positioning mechanism, FIG. 7 is an explanatory diagram showing the frequency characteristics of a hollow conical micro-positioning mechanism, and FIG. 8a
and FIG. 8b is a sectional view showing the bending operation of the hollow conical fine movement element body. 1 1 , 1 2 , 1 3 ... hollow conical fine movement element body, 2 ... insulating material, 3 ... detection probe stand, 4 ... detection probe holder, 5 ... detection probe, 6 ... inside Common electrode (GND), 7 1 , 7 2 ... electrode for x-axis operation, 8 1 , 8 2 ... electrode for y-axis operation, 9 ... electrode for z-axis operation, 10 ... sample stage, 11 ... Sample, 12
...Box body, 13...Joint, 14...Feeding mechanism.
Claims (1)
位置決め機構において、中空円すい状に形成され
た圧電素子体に少なくとも一軸動作用の電極を設
けたことを特徴とする圧電素子微小位置決め機構
。 A piezoelectric element micro-positioning mechanism for micro-positioning between a detection probe and a sample, characterized in that a piezoelectric element body formed in a hollow cone shape is provided with an electrode for at least one axis operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987152538U JPH0743604Y2 (en) | 1987-10-05 | 1987-10-05 | Piezoelectric element micro positioning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987152538U JPH0743604Y2 (en) | 1987-10-05 | 1987-10-05 | Piezoelectric element micro positioning mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180754U true JPH0180754U (en) | 1989-05-30 |
| JPH0743604Y2 JPH0743604Y2 (en) | 1995-10-09 |
Family
ID=31427557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987152538U Expired - Lifetime JPH0743604Y2 (en) | 1987-10-05 | 1987-10-05 | Piezoelectric element micro positioning mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0743604Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62117379A (en) * | 1985-11-16 | 1987-05-28 | Tohoku Metal Ind Ltd | Cylinder-type piezoelectric actuator and its manufacture |
-
1987
- 1987-10-05 JP JP1987152538U patent/JPH0743604Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62117379A (en) * | 1985-11-16 | 1987-05-28 | Tohoku Metal Ind Ltd | Cylinder-type piezoelectric actuator and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0743604Y2 (en) | 1995-10-09 |
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