JPH048907U - - Google Patents
Info
- Publication number
- JPH048907U JPH048907U JP5051790U JP5051790U JPH048907U JP H048907 U JPH048907 U JP H048907U JP 5051790 U JP5051790 U JP 5051790U JP 5051790 U JP5051790 U JP 5051790U JP H048907 U JPH048907 U JP H048907U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- movement mechanism
- fine movement
- sample
- moves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 230000005641 tunneling Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
第１図は本考案微動機構の断面図、第２図は本
考案微動機構の正面図、第３図は圧電素子体の変
形を示した図、第４図は従来の単一中空円筒圧電
素子概略図、第５図は単一中空円筒圧電素子の動
作説明図、第６図は実施例微動機構を組み込んだ
ユニツトの概略図をそれぞれ示したものである。
３……Ｘ，Ｙ駆動圧電素子、４……中間座、５
……Ｚ軸駆動圧電素子、１０……検出探針、２０
……微動機構。
Fig. 1 is a sectional view of the fine movement mechanism of the present invention, Fig. 2 is a front view of the fine movement mechanism of the invention, Fig. 3 is a diagram showing deformation of the piezoelectric element body, and Fig. 4 is a conventional single hollow cylindrical piezoelectric element. 5 is an explanatory diagram of the operation of a single hollow cylindrical piezoelectric element, and FIG. 6 is a schematic diagram of a unit incorporating the fine movement mechanism of the embodiment. 3...X, Y driving piezoelectric element, 4... Intermediate seat, 5
... Z-axis drive piezoelectric element, 10 ... Detection probe, 20
...Fine movement mechanism.
Claims (1)
機構において、垂直動作する中空型圧電素子と面
内動作Ｘ，Ｙする中空型圧電素子を中間座を介し
て同軸上に形成し二重構造としたことを特徴とす
る圧電素子微動機構。 (2) 前記圧電素子微動機構を試料と検出探針間
の三次元の微小位置決めに用いたことを特徴とす
る走査型トンネル顕微鏡。[Scope of Claim for Utility Model Registration] (1) In a fine movement mechanism that performs minute positioning between a sample and a detection part, a hollow piezoelectric element that moves vertically and a hollow piezoelectric element that moves in plane X and Y are connected via an intermediate seat. A piezoelectric element fine movement mechanism characterized by being coaxially formed and having a double structure. (2) A scanning tunneling microscope characterized in that the piezoelectric element fine movement mechanism is used for three-dimensional minute positioning between the sample and the detection probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5051790U JPH048907U (en) | 1990-05-14 | 1990-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5051790U JPH048907U (en) | 1990-05-14 | 1990-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH048907U true JPH048907U (en) | 1992-01-27 |
Family
ID=31569133
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5051790U Pending JPH048907U (en) | 1990-05-14 | 1990-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH048907U (en) |
-
1990
- 1990-05-14 JP JP5051790U patent/JPH048907U/ja active Pending