JPH0181857U - - Google Patents

Info

Publication number
JPH0181857U
JPH0181857U JP1987176488U JP17648887U JPH0181857U JP H0181857 U JPH0181857 U JP H0181857U JP 1987176488 U JP1987176488 U JP 1987176488U JP 17648887 U JP17648887 U JP 17648887U JP H0181857 U JPH0181857 U JP H0181857U
Authority
JP
Japan
Prior art keywords
electron beam
astigmatism
control signal
correcting
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987176488U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987176488U priority Critical patent/JPH0181857U/ja
Publication of JPH0181857U publication Critical patent/JPH0181857U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本案の一実施例を示す図、第２図は従
来技術の一実施例を示す図である。 １……電子線、２……非点収差補正コイル、３
……収束コイル、４……電流増幅器、５……制御
信号加算器、６……切換スイツチ、７……信号調
整手段。

Claims (1)

    【実用新案登録請求の範囲】
  1. 電子線を発生させる手段と、電子線を偏向する
    手段と、電子線を収束する手段と、電子線の非点
    収差を補正する手段を有する走査形電子顕微鏡ま
    たは、類似装置において、前記、電子線の非点収
    差を補正する手段の制御信号に、固定の制御信号
    を加算する手段を設けたことを特徴とする走査電
    子顕微鏡の非点収差補正装置。
JP1987176488U 1987-11-20 1987-11-20 Pending JPH0181857U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987176488U JPH0181857U (ja) 1987-11-20 1987-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987176488U JPH0181857U (ja) 1987-11-20 1987-11-20

Publications (1)

Publication Number Publication Date
JPH0181857U true JPH0181857U (ja) 1989-05-31

Family

ID=31468219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987176488U Pending JPH0181857U (ja) 1987-11-20 1987-11-20

Country Status (1)

Country Link
JP (1) JPH0181857U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1027563A (ja) * 1996-07-10 1998-01-27 Jeol Ltd 走査電子顕微鏡

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1027563A (ja) * 1996-07-10 1998-01-27 Jeol Ltd 走査電子顕微鏡

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