JPH0183065U - - Google Patents
Info
- Publication number
- JPH0183065U JPH0183065U JP1987178812U JP17881287U JPH0183065U JP H0183065 U JPH0183065 U JP H0183065U JP 1987178812 U JP1987178812 U JP 1987178812U JP 17881287 U JP17881287 U JP 17881287U JP H0183065 U JPH0183065 U JP H0183065U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- gas introduction
- plasma cvd
- gas
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 3
- 238000013459 approach Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178812U JPH0183065U (fr) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178812U JPH0183065U (fr) | 1987-11-26 | 1987-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183065U true JPH0183065U (fr) | 1989-06-02 |
Family
ID=31470411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178812U Pending JPH0183065U (fr) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183065U (fr) |
-
1987
- 1987-11-26 JP JP1987178812U patent/JPH0183065U/ja active Pending
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