JPH0183187U - - Google Patents
Info
- Publication number
- JPH0183187U JPH0183187U JP1987179350U JP17935087U JPH0183187U JP H0183187 U JPH0183187 U JP H0183187U JP 1987179350 U JP1987179350 U JP 1987179350U JP 17935087 U JP17935087 U JP 17935087U JP H0183187 U JPH0183187 U JP H0183187U
- Authority
- JP
- Japan
- Prior art keywords
- adsorbent
- temperature
- cryopanel
- low
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229920000049 Carbon (fiber) Polymers 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図、第２図および第３図は本考案の実施例
を示し、第１図は第１実施例のクライオパネルを
裏面から見た部分斜視図、第２図は第２実施例に
おける第１図相当図、第３図はクライオポンプの
全体構成を示す断面図である。第４図は従来例に
おける第１図相当図である。
Ａ……クライオポンプ、２……ヘリウム冷凍機
、７，８……ヒートステーシヨン、９，１０……
クライオパネル、１１……吸着媒、１２……接着
剤。
1, 2 and 3 show embodiments of the present invention, FIG. 1 is a partial perspective view of the cryopanel of the first embodiment seen from the back, and FIG. 2 is a partial perspective view of the cryopanel of the second embodiment. 1 and 3 are cross-sectional views showing the overall structure of the cryopump. FIG. 4 is a diagram corresponding to FIG. 1 in the conventional example. A... Cryopump, 2... Helium refrigerator, 7, 8... Heat station, 9, 10...
Cryopanel, 11... Adsorption medium, 12... Adhesive.
Claims (1)
約２０Ｋ以下の温度に冷却されるクライオパネル
１０に低温吸着媒１１が接着され、この低温吸着
媒１１によりガスを吸着させて排気するようにし
たクライオポンプにおいて、上記吸着媒１１とし
て活性炭繊維が用いられていることを特徴とする
クライオポンプ。 A cryopanel 10 is cooled to a temperature of about 20 K or less by thermal contact with a heat station 8 of a refrigerator 2, and a low-temperature adsorbent 11 is bonded to the cryopanel 10, and the low-temperature adsorbent 11 adsorbs gas and exhausts the gas. A cryopump characterized in that activated carbon fibers are used as the adsorbent 11 in the pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179350U JPH0183187U (en) | 1987-11-24 | 1987-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987179350U JPH0183187U (en) | 1987-11-24 | 1987-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183187U true JPH0183187U (en) | 1989-06-02 |
Family
ID=31470908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987179350U Pending JPH0183187U (en) | 1987-11-24 | 1987-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183187U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS557973A (en) * | 1978-07-04 | 1980-01-21 | Alpha Eng Kk | Adsorbing panel |
-
1987
- 1987-11-24 JP JP1987179350U patent/JPH0183187U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS557973A (en) * | 1978-07-04 | 1980-01-21 | Alpha Eng Kk | Adsorbing panel |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0183187U (en) | ||
| JPS6314878U (en) | ||
| JPH0250182U (en) | ||
| JPS61108843U (en) | ||
| JPS6226575U (en) | ||
| JPH01136378U (en) | ||
| JPS63134359U (en) | ||
| JPH0243475U (en) | ||
| JPS63143714U (en) | ||
| JPS61159766U (en) | ||
| JPS6226577U (en) | ||
| JPS6095299U (en) | Liquefied gas low temperature storage tank | |
| JPS6037775U (en) | refrigerator | |
| JPH0386021U (en) | ||
| JPS59193516U (en) | low temperature purifier | |
| JPH03106186U (en) | ||
| JPS6343049U (en) | ||
| JPS63198900U (en) | ||
| JPH0166577U (en) | ||
| JPS60101659U (en) | Adsorption refrigerator | |
| JPS63142658U (en) | ||
| JPH0248127U (en) | ||
| JPS59175973U (en) | refrigerator | |
| JPS6345050U (en) | ||
| JPS6254284U (en) |