JPH0183254U - - Google Patents
Info
- Publication number
- JPH0183254U JPH0183254U JP1987178327U JP17832787U JPH0183254U JP H0183254 U JPH0183254 U JP H0183254U JP 1987178327 U JP1987178327 U JP 1987178327U JP 17832787 U JP17832787 U JP 17832787U JP H0183254 U JPH0183254 U JP H0183254U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- introduction shaft
- particle beam
- shaft
- cushion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims 2
Description
第１図は本案による１実施例のシヤツターが開
いた状態を示した横断面図、第２図は同実施例の
シヤツターが閉じて電子線を遮断した状態を示し
た縦断面図である。
１…鏡筒、２…受金具、４…軸、５…軸、６…
筒、８…ゴムボール、９…溝、１０…シヤツター
板、１２…エアーシリンダー。
FIG. 1 is a cross-sectional view showing an open state of the shutter according to an embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view showing a state in which the shutter of the same embodiment is closed and blocks electron beams. 1... Lens barrel, 2... Bracket, 4... Shaft, 5... Shaft, 6...
Tube, 8...Rubber ball, 9...Groove, 10...Shutter plate, 12...Air cylinder.
Claims (1)
密に導入し真空外から導入軸を移動せる粒子線装
置に於けるシヤツター装置において、導入軸をエ
アーをクツシヨンにして停止させるように構成し
たことを特徴とする粒子線装置に於ける電子線シ
ヤツター装置。 A shutter device for a particle beam device in which an introduction shaft having a shutter at the tip is airtightly introduced into the device wall and the introduction shaft can be moved from outside the vacuum, characterized by being configured so that the introduction shaft is stopped by using air as a cushion. An electron beam shutter device in a particle beam device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178327U JPH0183254U (en) | 1987-11-25 | 1987-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178327U JPH0183254U (en) | 1987-11-25 | 1987-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183254U true JPH0183254U (en) | 1989-06-02 |
Family
ID=31469950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178327U Pending JPH0183254U (en) | 1987-11-25 | 1987-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183254U (en) |
-
1987
- 1987-11-25 JP JP1987178327U patent/JPH0183254U/ja active Pending
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