JPH0183325U - - Google Patents
Info
- Publication number
- JPH0183325U JPH0183325U JP1987178964U JP17896487U JPH0183325U JP H0183325 U JPH0183325 U JP H0183325U JP 1987178964 U JP1987178964 U JP 1987178964U JP 17896487 U JP17896487 U JP 17896487U JP H0183325 U JPH0183325 U JP H0183325U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- substrate
- laser
- cvd apparatus
- longer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001182 laser chemical vapour deposition Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 3
- 239000012495 reaction gas Substances 0.000 description 1
Description
第１図は本考案に係るレーザＣＶＤ装置の全体
的な構成及び光路を示す斜視図、第２図は同断面
図、第３図は前記レーザＣＶＤ装置の第２実施例
の構成及び光路を示す斜視図、第４図は従来のレ
ーザＣＶＤ装置の構成及び光路を示す断面図、第
５図は同斜視図である。
１０…レーザ装置、１２…レーザ光、１６…反
応槽、１８…基体、２０…反応ガス、２８…第１
のミラー、３０…第２のミラー、３４…第３のミ
ラー、３５…第４のミラー、３６…第５のミラー
。
FIG. 1 is a perspective view showing the overall structure and optical path of a laser CVD apparatus according to the present invention, FIG. 2 is a sectional view thereof, and FIG. 3 is a perspective view showing the structure and optical path of a second embodiment of the laser CVD apparatus. FIG. 4 is a sectional view showing the configuration and optical path of a conventional laser CVD apparatus, and FIG. 5 is a perspective view thereof. DESCRIPTION OF SYMBOLS 10... Laser device, 12... Laser light, 16... Reaction tank, 18... Substrate, 20... Reaction gas, 28... First
mirror, 30...second mirror, 34...third mirror, 35...fourth mirror, 36...fifth mirror.
Claims (1)
面形状を有するレーザ光を用いて、基体上に薄膜
を形成するためのレーザＣＶＤ装置において、 前記レーザ光を反射して、該レーザ光のビーム
断面形状を前記基体に対する水平方向長さが垂直
方向長さより長いものとするための、少なくとも
２枚の反射板を備え、 該反射板で反射されたレーザ光を、前記基体に
平行に入射するようになつていることを特徴とす
るレーザＣＶＤ装置。[Claims for Utility Model Registration] A laser CVD apparatus for forming a thin film on a substrate using a laser beam having a beam cross-sectional shape in which the vertical length is longer than the horizontal length, comprising: reflecting the laser beam; , comprising at least two reflecting plates for making the cross-sectional shape of the laser beam such that the horizontal length with respect to the substrate is longer than the vertical length, and the laser beam reflected by the reflecting plates is directed to the substrate. A laser CVD apparatus characterized in that the laser beam is incident parallel to the .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178964U JPH0183325U (en) | 1987-11-25 | 1987-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987178964U JPH0183325U (en) | 1987-11-25 | 1987-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0183325U true JPH0183325U (en) | 1989-06-02 |
Family
ID=31470555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987178964U Pending JPH0183325U (en) | 1987-11-25 | 1987-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0183325U (en) |
-
1987
- 1987-11-25 JP JP1987178964U patent/JPH0183325U/ja active Pending