JPH0184022U - - Google Patents
Info
- Publication number
- JPH0184022U JPH0184022U JP1987178813U JP17881387U JPH0184022U JP H0184022 U JPH0184022 U JP H0184022U JP 1987178813 U JP1987178813 U JP 1987178813U JP 17881387 U JP17881387 U JP 17881387U JP H0184022 U JPH0184022 U JP H0184022U
- Authority
- JP
- Japan
- Prior art keywords
- mass flow
- heater
- fastening fittings
- flow controller
- tightening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000009413 insulation Methods 0.000 description 2
Landscapes
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
Description
第１図は、本考案の実施例であるヒーターを分
解してマスフローコントローラーとの関係を示す
斜視図、第２図はヒーター組立時の正面図、第３
図は第２図の上面図、第４図は一部を断面で示し
た第２図の右側面図、第５図はマスフローコント
ローラーの断面図である。
１０……マスフローコントローラー、１４……
ベース部、１６……バルブ、２０……ヒーター、
２２ａ，２２ｂ……締付金具、２４ａ，２４ｂ…
…ねじ（着脱可能手段）、２６……プレート、２
８……加熱手段、３０……温度センサー、３２…
…断熱層、３４……保温カバー、３６ａ，３６ｂ
……ヒーターユニツト。
Fig. 1 is an exploded perspective view of a heater according to an embodiment of the present invention showing its relationship with a mass flow controller, Fig. 2 is a front view of the heater when it is assembled, and Fig. 3
The figures are a top view of FIG. 2, FIG. 4 is a right side view of FIG. 2 partially shown in cross section, and FIG. 5 is a sectional view of the mass flow controller. 10... Mass flow controller, 14...
Base part, 16... Valve, 20... Heater,
22a, 22b... tightening fittings, 24a, 24b...
...Screw (removable means), 26...Plate, 2
8... Heating means, 30... Temperature sensor, 32...
...Heat insulation layer, 34...Heat insulation cover, 36a, 36b
...heater unit.
Claims (1)
に締付金具を有する一対のヒーターユニツトの前
記締付金具を着脱可能手段により締付けることに
より、マスフローコントローラーのベース部の表
裏面を挟持することを特徴とする、 マスフローコントローラー用ヒーター。[Claims for Utility Model Registration] By tightening the fastening fittings of a pair of heater units having fastening fittings at both longitudinal ends of a plate provided with a heating means using a removable means, the base portion of the mass flow controller can be tightened. A heater for mass flow controllers that is characterized by sandwiching the front and back surfaces.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17881387U JPH0623943Y2 (en) | 1987-11-26 | 1987-11-26 | Heater for mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17881387U JPH0623943Y2 (en) | 1987-11-26 | 1987-11-26 | Heater for mass flow controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0184022U true JPH0184022U (en) | 1989-06-05 |
| JPH0623943Y2 JPH0623943Y2 (en) | 1994-06-22 |
Family
ID=31470412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17881387U Expired - Lifetime JPH0623943Y2 (en) | 1987-11-26 | 1987-11-26 | Heater for mass flow controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623943Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004066048A1 (en) * | 2003-01-17 | 2004-08-05 | Fujikin Incorporated | Flow control method for clustering fluid and flow control device for clustering fluid |
| WO2015141437A1 (en) * | 2014-03-20 | 2015-09-24 | 日立金属株式会社 | Thermal mass-flow meter and mass-flow control device using same |
-
1987
- 1987-11-26 JP JP17881387U patent/JPH0623943Y2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004066048A1 (en) * | 2003-01-17 | 2004-08-05 | Fujikin Incorporated | Flow control method for clustering fluid and flow control device for clustering fluid |
| WO2015141437A1 (en) * | 2014-03-20 | 2015-09-24 | 日立金属株式会社 | Thermal mass-flow meter and mass-flow control device using same |
| JPWO2015141437A1 (en) * | 2014-03-20 | 2017-04-06 | 日立金属株式会社 | Thermal mass flow meter and mass flow controller using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623943Y2 (en) | 1994-06-22 |