JPH0184426U - - Google Patents
Info
- Publication number
- JPH0184426U JPH0184426U JP1987181326U JP18132687U JPH0184426U JP H0184426 U JPH0184426 U JP H0184426U JP 1987181326 U JP1987181326 U JP 1987181326U JP 18132687 U JP18132687 U JP 18132687U JP H0184426 U JPH0184426 U JP H0184426U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- support bars
- holding
- grooves
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
Description
第１図は本考案の実施例を示す正断面図、第２
図及び第３図は従来の保持治具の一例を示し、第
２図は斜視図、第３図は正断面図を示す。第４図
は第２図保持治具の問題点を説明する要部平面図
を示す。
４……半導体ウエハ、５……支持棒、５ａ……
溝。
Figure 1 is a front sectional view showing an embodiment of the present invention, Figure 2 is a front sectional view showing an embodiment of the present invention.
3 and 3 show an example of a conventional holding jig, with FIG. 2 showing a perspective view and FIG. 3 showing a front sectional view. FIG. 4 shows a plan view of the main parts to explain the problems of the holding jig shown in FIG. 2. 4... Semiconductor wafer, 5... Support rod, 5a...
groove.
Claims (1)
周部を挿入し保持する溝を形成したものにおいて
、上記支持棒の断面形状を楕円形としたことを特
徴とする半導体ウエハ保持治具。 1. A semiconductor wafer holding jig comprising a plurality of support bars arranged in parallel with grooves for inserting and holding an outer peripheral portion of a semiconductor wafer, wherein the support bars have an elliptical cross-sectional shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181326U JPH0184426U (en) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181326U JPH0184426U (en) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184426U true JPH0184426U (en) | 1989-06-05 |
Family
ID=31472811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181326U Pending JPH0184426U (en) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184426U (en) |
-
1987
- 1987-11-27 JP JP1987181326U patent/JPH0184426U/ja active Pending