JPH042022U - - Google Patents
Info
- Publication number
- JPH042022U JPH042022U JP4259390U JP4259390U JPH042022U JP H042022 U JPH042022 U JP H042022U JP 4259390 U JP4259390 U JP 4259390U JP 4259390 U JP4259390 U JP 4259390U JP H042022 U JPH042022 U JP H042022U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- predetermined intervals
- manufacturing jig
- semiconductor manufacturing
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案に係る半導体製造治具の斜視図
、第２図は同じく平面図である。第３図は従来の
半導体製造治具の斜視図、第４図は同じく縦断側
面図である。
５……半導体ウエーハ、５ａ……底部、５ｂ…
…側部、７……ロツド、９……凹凸部、１０……
突起。
FIG. 1 is a perspective view of a semiconductor manufacturing jig according to the present invention, and FIG. 2 is a plan view thereof. FIG. 3 is a perspective view of a conventional semiconductor manufacturing jig, and FIG. 4 is a longitudinal side view of the same. 5... Semiconductor wafer, 5a... Bottom, 5b...
...Side part, 7... Rod, 9... Uneven part, 10...
protrusion.
Claims (1)
に整列保持する半導体製造治具であつて、 半導体ウエーハの底部及び両側部を支承する３
本のロツドの両端部を連結支持し、前記３本のロ
ツドの半導体ウエーハとの当接面に凹凸部を所定
間隔に形成したことを特徴とする半導体製造治具
。[Scope of Claim for Utility Model Registration] A semiconductor manufacturing jig that holds a large number of semiconductor wafers aligned in a vertical position at predetermined intervals, which supports the bottom and both sides of the semiconductor wafers.
1. A semiconductor manufacturing jig, characterized in that both ends of a book rod are connected and supported, and uneven portions are formed at predetermined intervals on the contact surfaces of the three rods with the semiconductor wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259390U JPH042022U (en) | 1990-04-20 | 1990-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259390U JPH042022U (en) | 1990-04-20 | 1990-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH042022U true JPH042022U (en) | 1992-01-09 |
Family
ID=31554271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4259390U Pending JPH042022U (en) | 1990-04-20 | 1990-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042022U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS647205U (en) * | 1987-06-30 | 1989-01-17 |
-
1990
- 1990-04-20 JP JP4259390U patent/JPH042022U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS647205U (en) * | 1987-06-30 | 1989-01-17 |