JPH0184435U - - Google Patents
Info
- Publication number
- JPH0184435U JPH0184435U JP1987180595U JP18059587U JPH0184435U JP H0184435 U JPH0184435 U JP H0184435U JP 1987180595 U JP1987180595 U JP 1987180595U JP 18059587 U JP18059587 U JP 18059587U JP H0184435 U JPH0184435 U JP H0184435U
- Authority
- JP
- Japan
- Prior art keywords
- tweezers
- suctioning
- hand pump
- utility
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図は本考案の実施例の断面図である。
なお、図において、１……ハンドポンプ、２…
…真空導入管、３……吸着部である。
FIG. 1 is a sectional view of an embodiment of the present invention. In addition, in the figure, 1... hand pump, 2...
...Vacuum introduction pipe, 3...Adsorption section.
Claims (1)
握部にハンドポンプを有することを特徴とする真
空ピンセツト。 A vacuum tweezers for suctioning a semiconductor substrate, characterized in that the tweezers have a hand pump in a grip part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180595U JPH0184435U (en) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180595U JPH0184435U (en) | 1987-11-26 | 1987-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184435U true JPH0184435U (en) | 1989-06-05 |
Family
ID=31472108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987180595U Pending JPH0184435U (en) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184435U (en) |
-
1987
- 1987-11-26 JP JP1987180595U patent/JPH0184435U/ja active Pending