JPH0344583U - - Google Patents
Info
- Publication number
- JPH0344583U JPH0344583U JP10522389U JP10522389U JPH0344583U JP H0344583 U JPH0344583 U JP H0344583U JP 10522389 U JP10522389 U JP 10522389U JP 10522389 U JP10522389 U JP 10522389U JP H0344583 U JPH0344583 U JP H0344583U
- Authority
- JP
- Japan
- Prior art keywords
- tip
- suction nozzle
- suction
- semiconductor device
- load
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Jigs For Machine Tools (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図ａは本考案の実施例１におけるワーク吸
着時を示す縦断面図、第１図ｂはバキユームＯＦ
Ｆ時を示す縦断面図、第２図は本考案の実施例２
を示す縦断面図である。
１…吸着ノズル、２…吸着パツド、３…荷重ブ
ロツク、４…ワーク。
FIG. 1a is a vertical cross-sectional view showing the workpiece suction in Example 1 of the present invention, and FIG. 1b is a vacuum OF
A vertical cross-sectional view showing the F time, FIG. 2 is a second embodiment of the present invention.
FIG. 1...Suction nozzle, 2...Suction pad, 3...Load block, 4...Workpiece.
Claims (1)
前記吸着ノズルの先端に組み込まれ半導体装置に
荷重を加える荷重ブロツクと、前記吸着ノズルの
先端に取付けられた吸着パツドとを含むことを特
徴とする半導体装置の吸着機構。 A suction nozzle attached to the tip of the transport unit,
A suction mechanism for a semiconductor device, comprising: a load block built into the tip of the suction nozzle to apply a load to the semiconductor device; and a suction pad attached to the tip of the suction nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10522389U JPH0344583U (en) | 1989-09-07 | 1989-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10522389U JPH0344583U (en) | 1989-09-07 | 1989-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0344583U true JPH0344583U (en) | 1991-04-25 |
Family
ID=31653992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10522389U Pending JPH0344583U (en) | 1989-09-07 | 1989-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0344583U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010512656A (en) * | 2006-12-11 | 2010-04-22 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Handling device for components, in particular electrical components |
-
1989
- 1989-09-07 JP JP10522389U patent/JPH0344583U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010512656A (en) * | 2006-12-11 | 2010-04-22 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Handling device for components, in particular electrical components |
| JP4768858B2 (en) * | 2006-12-11 | 2011-09-07 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | Handling device for components, in particular electrical components |