JPH0184892U - - Google Patents
Info
- Publication number
- JPH0184892U JPH0184892U JP1987181255U JP18125587U JPH0184892U JP H0184892 U JPH0184892 U JP H0184892U JP 1987181255 U JP1987181255 U JP 1987181255U JP 18125587 U JP18125587 U JP 18125587U JP H0184892 U JPH0184892 U JP H0184892U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- substrate
- optical system
- dust collection
- collection hood
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Prevention Of Fouling (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
図は本考案の実施例を示す縦断面図である。
１……集塵ダクト、２……セラミツク基板、３
…飛び散り、４……ノズル、５……集光レンズ、
６……光学系ヘツド機構部、７……レーザ光、８
……照射部。
The figure is a longitudinal sectional view showing an embodiment of the present invention. 1... Dust collection duct, 2... Ceramic substrate, 3
...Scatter, 4...Nozzle, 5...Condensing lens,
6...Optical system head mechanism section, 7...Laser light, 8
...Irradiation section.
Claims (1)
工する際、発生する粉塵及び飛び散りを捕集する
集塵フードにおいて、レーザ光を集光し、基板に
照射集光レンズ、ノズル及び機構部を有する光学
系ヘツド部と、前記光学系ヘツド部の全周に配置
され、底面が基板及び照射部に極力近く前記ノズ
ル及び機構部の形状にそつて一定の角度をもつて
上に広がる開口を有することを特徴とするレーザ
加工機の集塵フード。 A dust collection hood that collects dust and scattering that is generated when a flat workpiece is scribed with a laser, and an optical system that focuses laser light and has a condensing lens, a nozzle, and a mechanical part for irradiating the substrate. system head, and an opening that is disposed around the entire circumference of the optical system head and whose bottom surface is as close as possible to the substrate and the irradiation section and extends upward at a certain angle along the shape of the nozzle and mechanism. Features: Dust collection hood for laser processing machines.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181255U JPH0184892U (en) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181255U JPH0184892U (en) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184892U true JPH0184892U (en) | 1989-06-06 |
Family
ID=31472744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181255U Pending JPH0184892U (en) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184892U (en) |
-
1987
- 1987-11-27 JP JP1987181255U patent/JPH0184892U/ja active Pending