JPH0184892U - - Google Patents
Info
- Publication number
- JPH0184892U JPH0184892U JP1987181255U JP18125587U JPH0184892U JP H0184892 U JPH0184892 U JP H0184892U JP 1987181255 U JP1987181255 U JP 1987181255U JP 18125587 U JP18125587 U JP 18125587U JP H0184892 U JPH0184892 U JP H0184892U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- substrate
- optical system
- dust collection
- collection hood
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Prevention Of Fouling (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Description
図は本考案の実施例を示す縦断面図である。
１……集塵ダクト、２……セラミツク基板、３
…飛び散り、４……ノズル、５……集光レンズ、
６……光学系ヘツド機構部、７……レーザ光、８
……照射部。
…飛び散り、４……ノズル、５……集光レンズ、
６……光学系ヘツド機構部、７……レーザ光、８
……照射部。
Claims (1)
- 平板状被加工物をレーザによつてスクライブ加
工する際、発生する粉塵及び飛び散りを捕集する
集塵フードにおいて、レーザ光を集光し、基板に
照射集光レンズ、ノズル及び機構部を有する光学
系ヘツド部と、前記光学系ヘツド部の全周に配置
され、底面が基板及び照射部に極力近く前記ノズ
ル及び機構部の形状にそつて一定の角度をもつて
上に広がる開口を有することを特徴とするレーザ
加工機の集塵フード。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181255U JPH0184892U (ja) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987181255U JPH0184892U (ja) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184892U true JPH0184892U (ja) | 1989-06-06 |
Family
ID=31472744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987181255U Pending JPH0184892U (ja) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184892U (ja) |
-
1987
- 1987-11-27 JP JP1987181255U patent/JPH0184892U/ja active Pending