JPH0185672U - - Google Patents

Info

Publication number
JPH0185672U
JPH0185672U JP18083987U JP18083987U JPH0185672U JP H0185672 U JPH0185672 U JP H0185672U JP 18083987 U JP18083987 U JP 18083987U JP 18083987 U JP18083987 U JP 18083987U JP H0185672 U JPH0185672 U JP H0185672U
Authority
JP
Japan
Prior art keywords
probe
probe card
integrated circuit
embedded
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18083987U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18083987U priority Critical patent/JPH0185672U/ja
Publication of JPH0185672U publication Critical patent/JPH0185672U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案のプローブカードの縦断面図、
第２図ａは第１図のＡ部の拡大図、第２図ｂはプ
ローブの拡大図、第３図は従来のプローブカード
のプローブ周辺部の拡大断面図である。 １……プローブカード基板、２……プローブ、
３……プローブホルダ、４……集積回路素子、５
……ステージ、６……コネクタピン。

Claims (1)

    【実用新案登録請求の範囲】
  1. 集積回路素子の電気的特性を測定する際に用い
    られるプローブカードにおいて、探針部をプロー
    ブカード基板に埋め込んだことを特徴とするプロ
    ーブカード。
JP18083987U 1987-11-27 1987-11-27 Pending JPH0185672U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18083987U JPH0185672U (ja) 1987-11-27 1987-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18083987U JPH0185672U (ja) 1987-11-27 1987-11-27

Publications (1)

Publication Number Publication Date
JPH0185672U true JPH0185672U (ja) 1989-06-07

Family

ID=31472344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18083987U Pending JPH0185672U (ja) 1987-11-27 1987-11-27

Country Status (1)

Country Link
JP (1) JPH0185672U (ja)

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