JPH0186056U - - Google Patents
Info
- Publication number
- JPH0186056U JPH0186056U JP17956287U JP17956287U JPH0186056U JP H0186056 U JPH0186056 U JP H0186056U JP 17956287 U JP17956287 U JP 17956287U JP 17956287 U JP17956287 U JP 17956287U JP H0186056 U JPH0186056 U JP H0186056U
- Authority
- JP
- Japan
- Prior art keywords
- secondary ion
- mass spectrometer
- sample chamber
- ion mass
- glow discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第１図は本案の一実施例を説明する略線図であ
る。
１……試料台、２……２次イオン引出し電極、
３……２次イオン加速電源、４……２次イオン引
出し電源、５……２次イオン引出し／洗浄モード
切換え回路、６……グロー放電発生用直流電源、
７……試料室、８……ガス導入バルブ、９……ガ
ス。
FIG. 1 is a schematic diagram illustrating an embodiment of the present invention. 1...Sample stage, 2...Secondary ion extraction electrode,
3...Secondary ion accelerating power supply, 4...Secondary ion extraction power supply, 5...Secondary ion extraction/cleaning mode switching circuit, 6...DC power supply for glow discharge generation,
7...Sample chamber, 8...Gas introduction valve, 9...Gas.
Claims (1)
オン質量分析計の試料室において、グロー放電発
生用電源を備えたことを特徴とする二次イオン質
量分析計の試料室自動洗浄装置。 An automatic sample chamber cleaning device for a secondary ion mass spectrometer, characterized in that the sample chamber of the secondary ion mass spectrometer, which includes a sample stage and a secondary ion extraction electrode, is equipped with a power source for generating glow discharge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17956287U JPH0186056U (en) | 1987-11-27 | 1987-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17956287U JPH0186056U (en) | 1987-11-27 | 1987-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186056U true JPH0186056U (en) | 1989-06-07 |
Family
ID=31471109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17956287U Pending JPH0186056U (en) | 1987-11-27 | 1987-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186056U (en) |
-
1987
- 1987-11-27 JP JP17956287U patent/JPH0186056U/ja active Pending
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