JPH0229149U - - Google Patents
Info
- Publication number
- JPH0229149U JPH0229149U JP10813088U JP10813088U JPH0229149U JP H0229149 U JPH0229149 U JP H0229149U JP 10813088 U JP10813088 U JP 10813088U JP 10813088 U JP10813088 U JP 10813088U JP H0229149 U JPH0229149 U JP H0229149U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- generation chamber
- filament
- anode
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案のイオン発生装置の一実施例を
示す構成図、第２図は従来例を示す構成図である
。
２２……プラズマ発生室、２３……フイラメン
ト、２４……アノード、２５……イオン引出し電
極、２６……フイラメント電源、２７……アノー
ド電源、２８……イオン引出し電源、２９……Ｂ
ｅ―Ｃｕ、３０……ガス導入手段。
FIG. 1 is a block diagram showing an embodiment of the ion generator of the present invention, and FIG. 2 is a block diagram showing a conventional example. 22...Plasma generation chamber, 23...Filament, 24...Anode, 25...Ion extraction electrode, 26...Filament power supply, 27...Anode power supply, 28...Ion extraction power supply, 29...B
e-Cu, 30...Gas introduction means.
Claims (1)
室と、このプラズマ発生室の近傍に配置されたイ
オン引出し電極と、前記プラズマ発生室にキヤリ
アガスを導入するためのガス導入手段とを備え、
前記アノード電極の前記フイラメントに対向する
側にイオン化すべき金属を形成したことを特徴と
するイオン発生装置。 comprising a plasma generation chamber consisting of an anode and a filament, an ion extraction electrode disposed near the plasma generation chamber, and a gas introduction means for introducing a carrier gas into the plasma generation chamber,
An ion generating device characterized in that a metal to be ionized is formed on a side of the anode electrode facing the filament.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10813088U JPH0229149U (en) | 1988-08-17 | 1988-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10813088U JPH0229149U (en) | 1988-08-17 | 1988-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0229149U true JPH0229149U (en) | 1990-02-26 |
Family
ID=31343174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10813088U Pending JPH0229149U (en) | 1988-08-17 | 1988-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229149U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05225923A (en) * | 1991-10-11 | 1993-09-03 | Genus Inc | Ion source |
-
1988
- 1988-08-17 JP JP10813088U patent/JPH0229149U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05225923A (en) * | 1991-10-11 | 1993-09-03 | Genus Inc | Ion source |