JPH0187205U - - Google Patents
Info
- Publication number
- JPH0187205U JPH0187205U JP18391287U JP18391287U JPH0187205U JP H0187205 U JPH0187205 U JP H0187205U JP 18391287 U JP18391287 U JP 18391287U JP 18391287 U JP18391287 U JP 18391287U JP H0187205 U JPH0187205 U JP H0187205U
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic sensor
- film thickness
- oscillating part
- substrate
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000003595 spectral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
第１図はこの考案のセンサの説明図、第２図Ａ
および第２Ｂはそれぞれ異なる圧電体による基板
のみからの反射波のスペクトルを示す図、第３図
は極小部の周波数と膜厚の関係を示す図、第４図
Ａおよび第４図Ｂはそれぞれ異なる膜厚と圧電体
による反射スペクトルを示す図、第５図は異なる
入射角における極小部の周波数と膜厚の関係を示
す図、第６図Ａおよび第６図Ｂはそれぞれ異なる
膜厚と入射角による反射スペクトルを示す図であ
る。
１０……被検体、１２……膜、１４……基板、
１６……超音波伝搬媒体、１７……遅延材、１８
，１９……圧電体（発振部用）、２０，２１……
圧電体（受振部用）、３０……ホルダー、５０…
…超音波センサ、５１，５２……発振部、５３，
５４……受振部。
Figure 1 is an explanatory diagram of the sensor of this invention, Figure 2A
and 2B are diagrams showing the spectra of reflected waves from only the substrates of different piezoelectric materials, Figure 3 is a diagram showing the relationship between the frequency of the minimum part and the film thickness, and Figures 4A and 4B are different from each other. Figure 5 shows the relationship between the frequency of the minimum part and the film thickness at different angles of incidence. Figures 6A and 6B show the relationship between the film thickness and the reflection spectrum due to the piezoelectric material, respectively. FIG. 10... Subject, 12... Membrane, 14... Substrate,
16...Ultrasonic propagation medium, 17...Delay material, 18
, 19...Piezoelectric body (for oscillation part), 20, 21...
Piezoelectric body (for vibration receiver), 30...Holder, 50...
...Ultrasonic sensor, 51, 52... Oscillator, 53,
54... Receiving section.
補正 昭６３．５．２５
図面の簡単な説明を次のように補正する。
明細書第１２頁第１０行目「第２Ｂ」を「第２
図Ｂ」と補正する。Amendment May 25, 1983 The brief description of the drawing is amended as follows. “2nd B” on page 12, line 10 of the specification
Figure B”.
Claims (1)
検体の膜厚を測定するのに用いる超音波センサで
あつて、発振部より超音波を被検体に対して発振
し、その反射波を受振部で受振してそのスペクト
ル分布より前記被検体の膜厚を測定する超音波セ
ンサに於いて、前記発振部及び受振部を角度及び
／若しくは方向を変えて複数組設けたことを特色
とする超音波センサ。 This is an ultrasonic sensor used to measure the film thickness of a test object that has a substrate and a film formed on the substrate.It is an ultrasonic sensor that emits ultrasonic waves to the test object from an oscillating part and receives the reflected waves. The ultrasonic sensor is characterized in that a plurality of sets of the oscillating part and the receiving part are provided at different angles and/or directions, in the ultrasonic sensor that measures the film thickness of the object from the spectral distribution of the oscillating part. Sonic sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18391287U JPH0187205U (en) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18391287U JPH0187205U (en) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187205U true JPH0187205U (en) | 1989-06-08 |
Family
ID=31475312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18391287U Pending JPH0187205U (en) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187205U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04315909A (en) * | 1991-04-15 | 1992-11-06 | Toppan Printing Co Ltd | Layer thickness measuring method |
| JP2020153810A (en) * | 2019-03-20 | 2020-09-24 | 三菱電機株式会社 | Liquid detection method and liquid detection device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4835883A (en) * | 1971-09-09 | 1973-05-26 | ||
| JPS6120803A (en) * | 1984-07-10 | 1986-01-29 | Toppan Printing Co Ltd | Measuring method of film thickness |
-
1987
- 1987-12-02 JP JP18391287U patent/JPH0187205U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4835883A (en) * | 1971-09-09 | 1973-05-26 | ||
| JPS6120803A (en) * | 1984-07-10 | 1986-01-29 | Toppan Printing Co Ltd | Measuring method of film thickness |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04315909A (en) * | 1991-04-15 | 1992-11-06 | Toppan Printing Co Ltd | Layer thickness measuring method |
| JP2020153810A (en) * | 2019-03-20 | 2020-09-24 | 三菱電機株式会社 | Liquid detection method and liquid detection device |
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