JPH0187237U - - Google Patents
Info
- Publication number
- JPH0187237U JPH0187237U JP18196887U JP18196887U JPH0187237U JP H0187237 U JPH0187237 U JP H0187237U JP 18196887 U JP18196887 U JP 18196887U JP 18196887 U JP18196887 U JP 18196887U JP H0187237 U JPH0187237 U JP H0187237U
- Authority
- JP
- Japan
- Prior art keywords
- dust
- floating dust
- detection section
- sampling air
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005070 sampling Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 1
- 239000005416 organic matter Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
第１図は本考案によるレーザダストモニタの第
一の実施例を示す説明図、第２図は検出部を示す
部分拡大斜視図、第３図はダイクロイツクミラー
の特性を示すグラフ、第４図は第一及び第二の光
電変換器から信号処理回路へ入力する出力信号パ
ルスを示すタイミング線図、第５図は本考案の第
二の実施例を示す説明図、第６図は第三の実施例
を示す説明図、第７図は従来のレーザダストモニ
タを示す説明図である。
１，１ａ，１ｂ……検出部、２……Ｈｅ−Ｎｅ
レーザビーム、３……浮遊塵埃、４……散乱光、
５，５ａ，５ｂ……集光レンズ系、６ａ……第一
の光電変換器、６ｂ……第二の光電変換器、７…
…信号処理回路、１０……ダイクロイツクミラー
、１２……サンプリングエア、１４……紫外線レ
ーザビーム、１５……蛍光、１７……カツトフイ
ルタ、Ｂ……レーザビーム、Ｌ１，Ｌ２……集光
レンズ。
Fig. 1 is an explanatory diagram showing the first embodiment of the laser dust monitor according to the present invention, Fig. 2 is a partially enlarged perspective view showing the detection section, Fig. 3 is a graph showing the characteristics of the dichroic mirror, and Fig. 4. is a timing diagram showing the output signal pulses input from the first and second photoelectric converters to the signal processing circuit, FIG. 5 is an explanatory diagram showing the second embodiment of the present invention, and FIG. 6 is a diagram showing the third embodiment. FIG. 7 is an explanatory diagram showing a conventional laser dust monitor. 1, 1a, 1b...detection section, 2...He-Ne
Laser beam, 3... floating dust, 4... scattered light,
5, 5a, 5b... Condensing lens system, 6a... First photoelectric converter, 6b... Second photoelectric converter, 7...
... Signal processing circuit, 10 ... Dichroic mirror, 12 ... Sampling air, 14 ... Ultraviolet laser beam, 15 ... Fluorescence, 17 ... Cut filter, B ... Laser beam, L 1 , L 2 ... Focusing lens.
Claims (1)
だサンプリングエアを検出部に導入し、この検出
部にレーザビームを照射し上記サンプリングエア
中の浮遊塵埃に当つて発生する散乱光を集光レン
ズ系で集光すると共に、この光を光電変換器で電
気信号に変換して信号処理回路で処理することに
より塵埃測定をするレーザダストモニタにおいて
、上記検出部のサンプリングエアに紫外線レーザ
ビームを照射し、浮遊塵埃から発生する散乱光と
その浮遊塵埃中の有機物のみから発生する蛍光と
を別々に検出することにより、上記浮遊塵埃中に
含まれる有機物数を測定するようにしたことを特
徴とするレーザダストモニタ。 Sampling air containing floating dust, which is a mixture of inorganic and organic matter, is introduced into the detection section, and the detection section is irradiated with a laser beam, and the scattered light generated when it hits the floating dust in the sampling air is collected using a condensing lens system. In a laser dust monitor that measures dust by collecting light with a photoelectric converter, converting this light into an electric signal with a photoelectric converter, and processing it with a signal processing circuit, the sampling air of the detection section is irradiated with an ultraviolet laser beam, Laser dust, characterized in that the number of organic substances contained in the floating dust is measured by separately detecting scattered light generated from the floating dust and fluorescence generated only from organic substances in the floating dust. monitor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18196887U JPH0187237U (en) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18196887U JPH0187237U (en) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187237U true JPH0187237U (en) | 1989-06-08 |
Family
ID=31473429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18196887U Pending JPH0187237U (en) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187237U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5766342A (en) * | 1980-04-28 | 1982-04-22 | Agency Of Ind Science & Technol | Optical measuring method for suspension particles in medium |
| JPS61182238A (en) * | 1985-02-07 | 1986-08-14 | Sharp Corp | Inspection device for residue of organic compound of resist or the like |
-
1987
- 1987-12-01 JP JP18196887U patent/JPH0187237U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5766342A (en) * | 1980-04-28 | 1982-04-22 | Agency Of Ind Science & Technol | Optical measuring method for suspension particles in medium |
| JPS61182238A (en) * | 1985-02-07 | 1986-08-14 | Sharp Corp | Inspection device for residue of organic compound of resist or the like |
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