JPH0187268U - - Google Patents
Info
- Publication number
- JPH0187268U JPH0187268U JP18259587U JP18259587U JPH0187268U JP H0187268 U JPH0187268 U JP H0187268U JP 18259587 U JP18259587 U JP 18259587U JP 18259587 U JP18259587 U JP 18259587U JP H0187268 U JPH0187268 U JP H0187268U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- measuring means
- microscope
- inspecting
- probes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 2
- 239000000523 sample Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Description
第１図は本考案の一実施例の基板検査装置の要
部構成を示す説明図である。
１……電極端子、２……測定装置、３……測定
装置のプローブ、４……顕微鏡、５……顕微鏡の
視野、６……表示装置。
FIG. 1 is an explanatory diagram showing the main part configuration of a board inspection apparatus according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Electrode terminal, 2... Measuring device, 3... Probe of the measuring device, 4... Microscope, 5... Field of view of the microscope, 6... Display device.
Claims (1)
検査するための測定手段と、前記基板上の電極端
子および前記測定手段のプローブを目視するため
の顕微鏡と、前記顕微鏡の視野内に前記測定手段
の測定結果を表示する表示手段とを備えたことを
特徴とする基板検査装置。 a measuring means for inspecting the electrical characteristics of an electric circuit formed on a substrate; a microscope for visually observing the electrode terminals on the substrate and the probes of the measuring means; 1. A board inspection device comprising: display means for displaying measurement results of the means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18259587U JPH0187268U (en) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18259587U JPH0187268U (en) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187268U true JPH0187268U (en) | 1989-06-08 |
Family
ID=31474042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18259587U Pending JPH0187268U (en) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187268U (en) |
-
1987
- 1987-11-30 JP JP18259587U patent/JPH0187268U/ja active Pending
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