JPH0187393U - - Google Patents
Info
- Publication number
- JPH0187393U JPH0187393U JP18407087U JP18407087U JPH0187393U JP H0187393 U JPH0187393 U JP H0187393U JP 18407087 U JP18407087 U JP 18407087U JP 18407087 U JP18407087 U JP 18407087U JP H0187393 U JPH0187393 U JP H0187393U
- Authority
- JP
- Japan
- Prior art keywords
- hollow member
- vacuum chuck
- shaft part
- rear end
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Jigs For Machine Tools (AREA)
- Joints Allowing Movement (AREA)
Description
第１図は本考案の実施例に係る真空チヤツクス
ピンドルの一部分裁断した側面図、第２図は本考
案の実施例の組み付け状態を示す分解縦断面図、
第３図は本考案の他の実施例に係るノズル状中空
部材の縦断面図、第４図は本考案のさらに他の実
施例に係るノズル状中空部材の縦断面図である。
１……回転軸部、２……貫通孔、３……ハウジ
ング、７……モータ固定子、８……モータ回転子
、９……ノズル状中空部材、９ａ……ノズル部、
９ｂ……後端部、９ｃ……フランジ部。
FIG. 1 is a partially cutaway side view of a vacuum chuck spindle according to an embodiment of the present invention, and FIG. 2 is an exploded longitudinal sectional view showing an assembled state of the embodiment of the present invention.
FIG. 3 is a longitudinal cross-sectional view of a nozzle-shaped hollow member according to another embodiment of the present invention, and FIG. 4 is a longitudinal cross-sectional view of a nozzle-shaped hollow member according to still another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Rotating shaft part, 2... Through hole, 3... Housing, 7... Motor stator, 8... Motor rotor, 9... Nozzle-shaped hollow member, 9a... Nozzle part,
9b... rear end portion, 9c... flange portion.
Claims (1)
が形成された回転軸部と、前記軸部の後端内径部
に極少のラビリンス〓間で挿入された摺動性のあ
る中空部材とを有し、前記中空部材が真空発生装
置に連結されることを特徴とするシール継手付き
真空チヤツクスピンドル。 It has a rotating shaft part with a vacuum chuck attached to the tip and a through hole formed at the center of the shaft, and a slidable hollow member inserted into the inner diameter part of the rear end of the shaft part with a very small labyrinth. . A vacuum chuck spindle with a seal joint, characterized in that the hollow member is connected to a vacuum generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18407087U JPH0187393U (en) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18407087U JPH0187393U (en) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187393U true JPH0187393U (en) | 1989-06-09 |
Family
ID=31475456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18407087U Pending JPH0187393U (en) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187393U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5510717U (en) * | 1978-07-06 | 1980-01-23 | ||
| JPS61621U (en) * | 1984-06-06 | 1986-01-06 | 株式会社リコー | input/output device |
-
1987
- 1987-12-02 JP JP18407087U patent/JPH0187393U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5510717U (en) * | 1978-07-06 | 1980-01-23 | ||
| JPS61621U (en) * | 1984-06-06 | 1986-01-06 | 株式会社リコー | input/output device |