JPH0187534U - - Google Patents
Info
- Publication number
- JPH0187534U JPH0187534U JP18296787U JP18296787U JPH0187534U JP H0187534 U JPH0187534 U JP H0187534U JP 18296787 U JP18296787 U JP 18296787U JP 18296787 U JP18296787 U JP 18296787U JP H0187534 U JPH0187534 U JP H0187534U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- coating device
- inner diameter
- resist
- resist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案の実施例を示すレジスト塗布装
置の構成図、第２図は従来の第１のレジスト塗布
装置の構成図、第３図は従来の第２のレジスト塗
布装置の構成図である。
５１……レジスト容器、５２，５４，５７，５
９，６１，６２，６７，６８……パイプ、６０…
…フイルタ、５３，５８……逆流防止弁、５５…
…ベローズ、５６，６５……シリンダ、６３，６
６……エアバルブ、６４……ダイアフラム、６９
……ノズル、７０……ウエハ。
FIG. 1 is a configuration diagram of a resist coating device showing an embodiment of the present invention, FIG. 2 is a configuration diagram of a first conventional resist coating device, and FIG. 3 is a configuration diagram of a second conventional resist coating device. be. 51...Resist container, 52, 54, 57, 5
9, 61, 62, 67, 68...pipe, 60...
...Filter, 53, 58...Return prevention valve, 55...
...Bellows, 56,65...Cylinder, 63,6
6...Air valve, 64...Diaphragm, 69
... Nozzle, 70 ... Wafer.
Claims (1)
へのレジスト塗布装置において、 サツクバツク機構をレジスト供給経路とは別経
路に設けると共に、ノズル手前のパイプの内径を
他の箇所に配設されるパイプの内径よりも小さく
なるように形成してなるレジスト塗布装置。[Scope of Claim for Utility Model Registration] In a resist coating device for coating objects such as semiconductor wafers and photomask substrates, a back-back mechanism is provided in a route separate from the resist supply route, and the inner diameter of the pipe in front of the nozzle is moved to another location. A resist coating device formed to have a diameter smaller than the inner diameter of the pipe in which it is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296787U JPH0187534U (en) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18296787U JPH0187534U (en) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187534U true JPH0187534U (en) | 1989-06-09 |
Family
ID=31474405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18296787U Pending JPH0187534U (en) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187534U (en) |
-
1987
- 1987-12-02 JP JP18296787U patent/JPH0187534U/ja active Pending
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