JPH0189347U - - Google Patents

Info

Publication number
JPH0189347U
JPH0189347U JP18437987U JP18437987U JPH0189347U JP H0189347 U JPH0189347 U JP H0189347U JP 18437987 U JP18437987 U JP 18437987U JP 18437987 U JP18437987 U JP 18437987U JP H0189347 U JPH0189347 U JP H0189347U
Authority
JP
Japan
Prior art keywords
pressure
board
pressure sensor
flexible printed
amplifier circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18437987U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18437987U priority Critical patent/JPH0189347U/ja
Publication of JPH0189347U publication Critical patent/JPH0189347U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Description

【図面の簡単な説明】
第１図ａはこの考案の一実施例による半導体圧
力検出器の要部を示す断面図、第１図ｂは同じく
要部の平面図、第２図は従来の半導体圧力検出器
を示す内部構成図、第３図は従来の半導体圧力検
出器を示す断面図である。 ６はステム、９は圧力センサ素子、１０，１１
は電極、１２，１３は大気開放孔、２０はフレキ
シブルプリント配線板、２１は温度センサ。なお
、図中同一符号は同一、または相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ステムの上面に設けた圧力センサ素子により被
    測定圧と大気圧との差圧を測定し、増幅回路によ
    り増幅して圧力測定をする半導体圧力検出器にお
    いて、上記圧力センサ素子の電極をフレキシブル
    プリント配線板を介して上記増幅回路を構成する
    プリント基板に接続し、上記フレキシブルプリン
    ト配線板の配線パターンには温度センサを設けた
    ことを特徴とする半導体圧力検出器。
JP18437987U 1987-12-04 1987-12-04 Pending JPH0189347U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18437987U JPH0189347U (ja) 1987-12-04 1987-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18437987U JPH0189347U (ja) 1987-12-04 1987-12-04

Publications (1)

Publication Number Publication Date
JPH0189347U true JPH0189347U (ja) 1989-06-13

Family

ID=31475749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18437987U Pending JPH0189347U (ja) 1987-12-04 1987-12-04

Country Status (1)

Country Link
JP (1) JPH0189347U (ja)

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