JPS6378230U - - Google Patents

Info

Publication number
JPS6378230U
JPS6378230U JP17304986U JP17304986U JPS6378230U JP S6378230 U JPS6378230 U JP S6378230U JP 17304986 U JP17304986 U JP 17304986U JP 17304986 U JP17304986 U JP 17304986U JP S6378230 U JPS6378230 U JP S6378230U
Authority
JP
Japan
Prior art keywords
thin film
metal thin
semiconductor thin
connector
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17304986U
Other languages
English (en)
Other versions
JPH0338668Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986173049U priority Critical patent/JPH0338668Y2/ja
Publication of JPS6378230U publication Critical patent/JPS6378230U/ja
Application granted granted Critical
Publication of JPH0338668Y2 publication Critical patent/JPH0338668Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第１図は、本考案センサの一例の概要を示す斜
面図、第２図は、本考案センサの他の一例の概要
を示す斜面図、第３図は、本考案センサの使用例
を示す斜面図、第４図は、本考案センサの真空下
での応答特性を示すグラフである。 １……基板、３……半導体薄膜又は金属薄膜、
５……薄膜電極、７……コネクタ、９……ゲージ
ヘツド。

Claims (1)

    【実用新案登録請求の範囲】
  1. 耐熱性極薄フイルムからなる基板上に半導体薄
    膜又は金属薄膜を備え、該半導体薄膜又は金属薄
    膜と測定回路との電気的接続をコネクタを介して
    行なうようにしたことを特徴とする熱伝導型真空
    計用センサ。
JP1986173049U 1986-11-10 1986-11-10 Expired JPH0338668Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986173049U JPH0338668Y2 (ja) 1986-11-10 1986-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986173049U JPH0338668Y2 (ja) 1986-11-10 1986-11-10

Publications (2)

Publication Number Publication Date
JPS6378230U true JPS6378230U (ja) 1988-05-24
JPH0338668Y2 JPH0338668Y2 (ja) 1991-08-15

Family

ID=31110149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986173049U Expired JPH0338668Y2 (ja) 1986-11-10 1986-11-10

Country Status (1)

Country Link
JP (1) JPH0338668Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010502949A (ja) * 2006-08-29 2010-01-28 イーストマン コダック カンパニー 有機物のための圧力ゲージ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240135A (ja) * 1985-04-17 1986-10-25 Yamatake Honeywell Co Ltd 真空計
JPS61173043U (ja) * 1985-04-17 1986-10-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240135A (ja) * 1985-04-17 1986-10-25 Yamatake Honeywell Co Ltd 真空計
JPS61173043U (ja) * 1985-04-17 1986-10-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010502949A (ja) * 2006-08-29 2010-01-28 イーストマン コダック カンパニー 有機物のための圧力ゲージ

Also Published As

Publication number Publication date
JPH0338668Y2 (ja) 1991-08-15

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