JPH0189734U - - Google Patents
Info
- Publication number
- JPH0189734U JPH0189734U JP18575787U JP18575787U JPH0189734U JP H0189734 U JPH0189734 U JP H0189734U JP 18575787 U JP18575787 U JP 18575787U JP 18575787 U JP18575787 U JP 18575787U JP H0189734 U JPH0189734 U JP H0189734U
- Authority
- JP
- Japan
- Prior art keywords
- ray exposure
- ray
- tilted
- mask
- diffraction grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000006096 absorbing agent Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案による一実施例を示す要部模型
図、第２図はＸ線ビームの反射状況を示す図であ
る。
１：入射Ｘ線、２：反射板、３：回折格子面、
４：反射Ｘ線、５：Ｘ線マスク、６：ウエハ。
FIG. 1 is a schematic diagram of the main parts of an embodiment of the present invention, and FIG. 2 is a diagram showing the state of reflection of an X-ray beam. 1: Incident X-ray, 2: Reflector, 3: Diffraction grating surface,
4: Reflected X-ray, 5: X-ray mask, 6: Wafer.
Claims (1)
が形成されたマスクを通して半導体基板上に塗布
されたレジストを露光するＸ線露光装置において
、Ｘ線源と半導体基板間に単結晶表面に対して傾
斜した回折格子面を形成した反射板を配置してな
ることを特徴とするＸ線露光装置。 In an X-ray exposure system that exposes a resist coated on a semiconductor substrate with X-rays emitted from an X-ray source through a mask on which an absorber pattern is formed, there is a 1. An X-ray exposure apparatus characterized in that a reflecting plate is provided with a diffraction grating surface tilted at a tilted angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18575787U JPH0189734U (en) | 1987-12-04 | 1987-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18575787U JPH0189734U (en) | 1987-12-04 | 1987-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189734U true JPH0189734U (en) | 1989-06-13 |
Family
ID=31477024
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18575787U Pending JPH0189734U (en) | 1987-12-04 | 1987-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189734U (en) |
-
1987
- 1987-12-04 JP JP18575787U patent/JPH0189734U/ja active Pending
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