JPH0192126U - - Google Patents

Info

Publication number
JPH0192126U
JPH0192126U JP1987187503U JP18750387U JPH0192126U JP H0192126 U JPH0192126 U JP H0192126U JP 1987187503 U JP1987187503 U JP 1987187503U JP 18750387 U JP18750387 U JP 18750387U JP H0192126 U JPH0192126 U JP H0192126U
Authority
JP
Japan
Prior art keywords
parallelism
trays
wafers
sensor
normal pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987187503U
Other languages
Japanese (ja)
Other versions
JPH06817Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987187503U priority Critical patent/JPH06817Y2/en
Publication of JPH0192126U publication Critical patent/JPH0192126U/ja
Application granted granted Critical
Publication of JPH06817Y2 publication Critical patent/JPH06817Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の概略図である。 １……ウエハー（半導体基板）、２……トレイ
、３……トレイ搬送ベルト、４……ガス混合吹き
出しヘツド、５……ガス導入ホース、６……距離
測定用センサ、７……調整機構。 FIG. 1 is a schematic diagram of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Wafer (semiconductor substrate), 2...Tray, 3...Tray conveyor belt, 4...Gas mixing blowing head, 5...Gas introduction hose, 6...Distance measurement sensor, 7...Adjustment mechanism.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエハーを枚葉処理する複数のトレイと、該ト
レイ上のウエハーにガスを吹き付けるガス混合吹
き出しヘツドとを備えた常圧ＣＶＤ装置において
、ガス混合吹き出しヘツドとトレイ上のウエハー
との平行度及び隙間距離を測定するセンサと、該
センサからの測定信号に基づいて前記平行度及び
隙間距離を設定値に調整する調整機構とを装備し
たことを特徴とする常圧ＣＶＤ装置。 In a normal pressure CVD apparatus equipped with a plurality of trays for single-wafer processing of wafers and a gas mixing blowing head for blowing gas onto the wafers on the trays, the parallelism and gap distance between the gas mixing blowing head and the wafers on the trays are What is claimed is: 1. A normal pressure CVD apparatus comprising: a sensor for measuring the parallelism; and an adjustment mechanism for adjusting the parallelism and gap distance to set values based on measurement signals from the sensor.
JP1987187503U 1987-12-09 1987-12-09 Atmospheric pressure CVD equipment Expired - Lifetime JPH06817Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987187503U JPH06817Y2 (en) 1987-12-09 1987-12-09 Atmospheric pressure CVD equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987187503U JPH06817Y2 (en) 1987-12-09 1987-12-09 Atmospheric pressure CVD equipment

Publications (2)

Publication Number Publication Date
JPH0192126U true JPH0192126U (en) 1989-06-16
JPH06817Y2 JPH06817Y2 (en) 1994-01-05

Family

ID=31478651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987187503U Expired - Lifetime JPH06817Y2 (en) 1987-12-09 1987-12-09 Atmospheric pressure CVD equipment

Country Status (1)

Country Link
JP (1) JPH06817Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013216948A (en) * 2012-04-10 2013-10-24 Kojima Press Industry Co Ltd Plasma cvd apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62278477A (en) * 1986-05-28 1987-12-03 Mitsubishi Electric Corp Aid system for garaging automobile

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62278477A (en) * 1986-05-28 1987-12-03 Mitsubishi Electric Corp Aid system for garaging automobile

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013216948A (en) * 2012-04-10 2013-10-24 Kojima Press Industry Co Ltd Plasma cvd apparatus

Also Published As

Publication number Publication date
JPH06817Y2 (en) 1994-01-05

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