JPH0192126U - - Google Patents
Info
- Publication number
- JPH0192126U JPH0192126U JP18750387U JP18750387U JPH0192126U JP H0192126 U JPH0192126 U JP H0192126U JP 18750387 U JP18750387 U JP 18750387U JP 18750387 U JP18750387 U JP 18750387U JP H0192126 U JPH0192126 U JP H0192126U
- Authority
- JP
- Japan
- Prior art keywords
- parallelism
- trays
- wafers
- sensor
- normal pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例の概略図である。
１……ウエハー（半導体基板）、２……トレイ
、３……トレイ搬送ベルト、４……ガス混合吹き
出しヘツド、５……ガス導入ホース、６……距離
測定用センサ、７……調整機構。
、３……トレイ搬送ベルト、４……ガス混合吹き
出しヘツド、５……ガス導入ホース、６……距離
測定用センサ、７……調整機構。
Claims (1)
- ウエハーを枚葉処理する複数のトレイと、該ト
レイ上のウエハーにガスを吹き付けるガス混合吹
き出しヘツドとを備えた常圧ＣＶＤ装置において
、ガス混合吹き出しヘツドとトレイ上のウエハー
との平行度及び隙間距離を測定するセンサと、該
センサからの測定信号に基づいて前記平行度及び
隙間距離を設定値に調整する調整機構とを装備し
たことを特徴とする常圧ＣＶＤ装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987187503U JPH06817Y2 (ja) | 1987-12-09 | 1987-12-09 | 常圧ｃｖｄ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987187503U JPH06817Y2 (ja) | 1987-12-09 | 1987-12-09 | 常圧ｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0192126U true JPH0192126U (ja) | 1989-06-16 |
| JPH06817Y2 JPH06817Y2 (ja) | 1994-01-05 |
Family
ID=31478651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987187503U Expired - Lifetime JPH06817Y2 (ja) | 1987-12-09 | 1987-12-09 | 常圧ｃｖｄ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06817Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013216948A (ja) * | 2012-04-10 | 2013-10-24 | Kojima Press Industry Co Ltd | プラズマｃｖｄ装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62278477A (ja) * | 1986-05-28 | 1987-12-03 | Mitsubishi Electric Corp | 自動車の車庫入れ支援システム |
-
1987
- 1987-12-09 JP JP1987187503U patent/JPH06817Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62278477A (ja) * | 1986-05-28 | 1987-12-03 | Mitsubishi Electric Corp | 自動車の車庫入れ支援システム |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013216948A (ja) * | 2012-04-10 | 2013-10-24 | Kojima Press Industry Co Ltd | プラズマｃｖｄ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06817Y2 (ja) | 1994-01-05 |