JPH0194451U - - Google Patents
Info
- Publication number
- JPH0194451U JPH0194451U JP18989087U JP18989087U JPH0194451U JP H0194451 U JPH0194451 U JP H0194451U JP 18989087 U JP18989087 U JP 18989087U JP 18989087 U JP18989087 U JP 18989087U JP H0194451 U JPH0194451 U JP H0194451U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- lid
- center
- evaporation source
- small hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000002994 raw material Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の蒸発源用ルツボの断面図であ
り、第２図は従来の蒸発源用ルツボの断面図であ
る。
り、第２図は従来の蒸発源用ルツボの断面図であ
る。
Claims (1)
- 蒸着原料を収容するルツボ本体と、中央に小穴
を有する蓋とからなる蒸発源用ルツボにおいて、
蓋の小穴の周囲を中心から周辺に向かつて水平に
対して３０〜４５°傾斜する円錐形とすることを
特徴とする蒸発源用ルツボ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18989087U JPH0194451U (ja) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18989087U JPH0194451U (ja) | 1987-12-16 | 1987-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0194451U true JPH0194451U (ja) | 1989-06-21 |
Family
ID=31480898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18989087U Pending JPH0194451U (ja) | 1987-12-16 | 1987-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0194451U (ja) |
-
1987
- 1987-12-16 JP JP18989087U patent/JPH0194451U/ja active Pending