JPS6346461U - - Google Patents

Info

Publication number
JPS6346461U
JPS6346461U JP14096386U JP14096386U JPS6346461U JP S6346461 U JPS6346461 U JP S6346461U JP 14096386 U JP14096386 U JP 14096386U JP 14096386 U JP14096386 U JP 14096386U JP S6346461 U JPS6346461 U JP S6346461U
Authority
JP
Japan
Prior art keywords
hearth liner
crucible
pin
vacuum evaporation
hearth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14096386U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14096386U priority Critical patent/JPS6346461U/ja
Publication of JPS6346461U publication Critical patent/JPS6346461U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は、本考案の一実施例を示す要部断面図
である。第２図及び第３図は他の実施例を示す要
部概略図、第４図は従来技術を示す部分断面図で
ある。 １……ハースライナ、２……るつぼ、９……ピ
ン、１０……ピン受け、１１……蒸発物、１２…
…ハースライナ、１３……ハースライナ、１４…
…ピン。

Claims (1)

    【実用新案登録請求の範囲】
  1. ハースライナを挿着したるつぼに蒸発物を装入
    するようにした真空蒸着装置において、前記るつ
    ぼにピンを突設する一方、前記ハースライナに該
    ピンのはまるピン受けを凹設し、ハースライナを
    るつぼ内に着脱自在に浮上支持させたことを特徴
    とするハースライナ付真空蒸着装置。
JP14096386U 1986-09-13 1986-09-13 Pending JPS6346461U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14096386U JPS6346461U (ja) 1986-09-13 1986-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14096386U JPS6346461U (ja) 1986-09-13 1986-09-13

Publications (1)

Publication Number Publication Date
JPS6346461U true JPS6346461U (ja) 1988-03-29

Family

ID=31048311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14096386U Pending JPS6346461U (ja) 1986-09-13 1986-09-13

Country Status (1)

Country Link
JP (1) JPS6346461U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04272088A (ja) * 1991-02-27 1992-09-28 Nissei Eng:Yugen 挟持形吊具

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5858277A (ja) * 1981-10-03 1983-04-06 Matsushita Electric Works Ltd 蒸着装置
JPS58213874A (ja) * 1982-06-02 1983-12-12 Matsushita Electric Ind Co Ltd 電子ビ−ム蒸着用ルツボ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5858277A (ja) * 1981-10-03 1983-04-06 Matsushita Electric Works Ltd 蒸着装置
JPS58213874A (ja) * 1982-06-02 1983-12-12 Matsushita Electric Ind Co Ltd 電子ビ−ム蒸着用ルツボ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04272088A (ja) * 1991-02-27 1992-09-28 Nissei Eng:Yugen 挟持形吊具

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