JPH0194455U - - Google Patents

Info

Publication number
JPH0194455U
JPH0194455U JP18968087U JP18968087U JPH0194455U JP H0194455 U JPH0194455 U JP H0194455U JP 18968087 U JP18968087 U JP 18968087U JP 18968087 U JP18968087 U JP 18968087U JP H0194455 U JPH0194455 U JP H0194455U
Authority
JP
Japan
Prior art keywords
tubular
target connector
vacuum chamber
target
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18968087U
Other languages
English (en)
Other versions
JPH0543091Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18968087U priority Critical patent/JPH0543091Y2/ja
Publication of JPH0194455U publication Critical patent/JPH0194455U/ja
Application granted granted Critical
Publication of JPH0543091Y2 publication Critical patent/JPH0543091Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は本考案の実施例装置の断面図、第２図
はターゲツト連結体の拡大図、第３図、第４図及
び第５図は実施例装置の作動説明図である。 １０…真空チヤンバ、１２…ターゲツト連結体
、１４，１６…管状ホルダ、１８…ターゲツト、
２４，２６…絶縁材、２８，３０…電極、３２，
３４…リテーナ、３６…被コーテイング管材、３
８…ダミー基板。

Claims (1)

  1. 【実用新案登録請求の範囲】 排気装置に接続される真空チヤンバと、 該真空チヤンバの両側から該真空チヤンバ内に
    差し込まれ、それぞれその長手方向に移動可能な
    １対の管状ホルダ及び、両端がそれぞれこれら管
    状ホルダのチヤンバ内の先端に連結され、その内
    孔が管状ホルダの内孔に連通された管状のターゲ
    ツトよりなるターゲツト連結体と、 チヤンバ内の一方において該ターゲツト連結体
    と同軸に配置されたダミー基板と、 チヤンバ内の他方において該ターゲツト連結体
    と同軸に被コーテイング管材を保持可能なリテー
    ナと、を備えてなる管材内面のスパツタ装置。
JP18968087U 1987-12-14 1987-12-14 Expired - Lifetime JPH0543091Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18968087U JPH0543091Y2 (ja) 1987-12-14 1987-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18968087U JPH0543091Y2 (ja) 1987-12-14 1987-12-14

Publications (2)

Publication Number Publication Date
JPH0194455U true JPH0194455U (ja) 1989-06-21
JPH0543091Y2 JPH0543091Y2 (ja) 1993-10-29

Family

ID=31480699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18968087U Expired - Lifetime JPH0543091Y2 (ja) 1987-12-14 1987-12-14

Country Status (1)

Country Link
JP (1) JPH0543091Y2 (ja)

Also Published As

Publication number Publication date
JPH0543091Y2 (ja) 1993-10-29

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