JPH0195604U - - Google Patents
Info
- Publication number
- JPH0195604U JPH0195604U JP19131787U JP19131787U JPH0195604U JP H0195604 U JPH0195604 U JP H0195604U JP 19131787 U JP19131787 U JP 19131787U JP 19131787 U JP19131787 U JP 19131787U JP H0195604 U JPH0195604 U JP H0195604U
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- interference method
- measuring
- fringe scanning
- surface shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 238000010008 shearing Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 8
- 238000010586 diagram Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
第１図は本発明の一実施例の非球面形状測定時
の構成図、第２図は球面形状測定時の構成図、第
３図は従来の縞走査シエアリング干渉方式の表面
形状測定の説明図、第４図は従来の非球面と球面
の表面形状測定の説明図である。
１……レーザ発振器、２……ビームエクスパン
ダー、４，９……ビームスプリツター、５……対
物レンズ、６，５３，５８……ミラー、７，５２
……電歪素子、１０……結像レンズ、１１……Ｔ
Ｖカメラ、６１……画像処理プロセツサ、１２…
…被測定物、５１……１／２波長板、５４……偏
光ビームスプリツター、５５，５６……１／４波
長板、５７……偏光板、５９……シヤツター、６
０……微動機構。
Fig. 1 is a block diagram when measuring an aspherical surface shape according to an embodiment of the present invention, Fig. 2 is a block diagram when measuring a spherical shape, and Fig. 3 is an explanatory diagram of surface shape measurement using the conventional fringe scanning shearing interference method. , FIG. 4 is an explanatory diagram of conventional surface shape measurement of aspherical and spherical surfaces. 1... Laser oscillator, 2... Beam expander, 4, 9... Beam splitter, 5... Objective lens, 6, 53, 58... Mirror, 7, 52
...Electrostrictive element, 10...Imaging lens, 11...T
V camera, 61... Image processing processor, 12...
...Object to be measured, 51...1/2 wavelength plate, 54...Polarizing beam splitter, 55, 56...1/4 wavelength plate, 57...Polarizing plate, 59...Shutter, 6
0... Fine movement mechanism.
Claims (1)
グ干渉方式で測定するための第１の光学系と、縞
走査トワイマン・グリーン干渉方式で測定するた
めの第２の光学系と、上記第１の光学系と上記第
２の光学系を切り換えるためのシヤツター及び偏
光素子と、縞走査トワイマン・グリーン干渉方式
における測定用光量と参照用光量とを調整する手
段とを有する事を特徴とする光学表面の形状測定
装置。 a first optical system for measuring the optical surface shape of the object to be measured using a fringe scanning shearing interference method; a second optical system for measuring the optical surface shape of the object using a fringe scanning Twyman-Green interference method; and the first optical system. A shape of an optical surface characterized by having a shutter and a polarizing element for switching between the optical system and the second optical system, and means for adjusting the measurement light amount and the reference light amount in the fringe scanning Twyman-Green interference method. measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19131787U JPH0195604U (en) | 1987-12-18 | 1987-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19131787U JPH0195604U (en) | 1987-12-18 | 1987-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0195604U true JPH0195604U (en) | 1989-06-23 |
Family
ID=31482236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19131787U Pending JPH0195604U (en) | 1987-12-18 | 1987-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0195604U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011107139A (en) * | 2009-11-20 | 2011-06-02 | Mitsutoyo Corp | Apparatus and method for measuring surface shape of object and part kit |
-
1987
- 1987-12-18 JP JP19131787U patent/JPH0195604U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011107139A (en) * | 2009-11-20 | 2011-06-02 | Mitsutoyo Corp | Apparatus and method for measuring surface shape of object and part kit |
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