JPH03123205U - - Google Patents
Info
- Publication number
- JPH03123205U JPH03123205U JP3103990U JP3103990U JPH03123205U JP H03123205 U JPH03123205 U JP H03123205U JP 3103990 U JP3103990 U JP 3103990U JP 3103990 U JP3103990 U JP 3103990U JP H03123205 U JPH03123205 U JP H03123205U
- Authority
- JP
- Japan
- Prior art keywords
- phase
- electro
- imaging
- measurement
- changing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 3
- 230000000694 effects Effects 0.000 claims 2
- 230000010363 phase shift Effects 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
第１図は本考案の一実施例の系統図、第２図、
第３図は従来例の系統図である。
１……レーザ発振器、４……偏光ビームスプリ
ツタ、６，９……1/4波長板、１８……電気光学
結晶、２２……ピエゾ素子、３１……変倍光学系
レンズ、３２……結像光学系レンズ。
Figure 1 is a system diagram of an embodiment of the present invention; Figure 2;
FIG. 3 is a system diagram of a conventional example. 1... Laser oscillator, 4... Polarizing beam splitter, 6, 9... 1/4 wavelength plate, 18... Electro-optic crystal, 22... Piezo element, 31... Variable magnification optical system lens, 32... Imaging optical system lens.
Claims (1)
光をそれぞれ参照光、測定光とするレーザ干渉測
定系における前記二直線偏光の共通の光路中に、
電気光学効果をもつ部材と、前記部材に電圧を印
加する装置とを備え、電気光学効果をもつ部材の
移相量が０，π／２，π，3/2πとなる様に印加
電圧を制御し、参照光と測定光間の位相差をπ／
２毎に変化させ、各干渉縞パターンをフレームメ
モリに取り込み、演算処理する手段を設けたこと
を特徴とする位相測定干渉計。 ２ 請求項１において、被測定物がＴＶカメラの
撮像面に結像する結像光学系手段、前記被測定物
の撮像倍率を変える事のできる変倍光学系手段を
持つ位相測定干渉計。[Claims for Utility Model Registration] 1. In a laser interference measurement system in which two linearly polarized laser beams whose polarization planes are perpendicular to each other are used as a reference beam and a measuring beam, respectively, in a common optical path of the two linearly polarized beams,
A device comprising a member having an electro-optic effect and a device for applying a voltage to the member, and controlling the applied voltage so that the amount of phase shift of the member having an electro-optic effect is 0, π/2, π, and 3/2π. and the phase difference between the reference light and measurement light is π/
1. A phase measuring interferometer, characterized in that the phase measuring interferometer is provided with a means for changing the interference fringe pattern every 2 seconds, capturing each interference fringe pattern into a frame memory, and performing arithmetic processing. 2. The phase measurement interferometer according to claim 1, comprising an imaging optical system means for forming an image of the object to be measured on an imaging surface of a TV camera, and a variable magnification optical system means for changing the imaging magnification of the object to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3103990U JPH03123205U (en) | 1990-03-28 | 1990-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3103990U JPH03123205U (en) | 1990-03-28 | 1990-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03123205U true JPH03123205U (en) | 1991-12-16 |
Family
ID=31533766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3103990U Pending JPH03123205U (en) | 1990-03-28 | 1990-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03123205U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009152000A (en) * | 2007-12-19 | 2009-07-09 | Nec Electronics Corp | Socket for semiconductor device |
-
1990
- 1990-03-28 JP JP3103990U patent/JPH03123205U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009152000A (en) * | 2007-12-19 | 2009-07-09 | Nec Electronics Corp | Socket for semiconductor device |
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