JPH0195726U - - Google Patents
Info
- Publication number
- JPH0195726U JPH0195726U JP19237287U JP19237287U JPH0195726U JP H0195726 U JPH0195726 U JP H0195726U JP 19237287 U JP19237287 U JP 19237287U JP 19237287 U JP19237287 U JP 19237287U JP H0195726 U JPH0195726 U JP H0195726U
- Authority
- JP
- Japan
- Prior art keywords
- reactor
- utility
- scope
- registration request
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案の実施例を示す模式図、第２図
は従来例を示す断面図である。 １１……反応炉、１３……ガス排出口、１７…
…プラズマ炉。
は従来例を示す断面図である。 １１……反応炉、１３……ガス排出口、１７…
…プラズマ炉。
Claims (1)
- 反応炉の排気側に酸素プラズマ発生器を接続し
たことを特徴とする有機金属気相成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19237287U JPH0195726U (ja) | 1987-12-17 | 1987-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19237287U JPH0195726U (ja) | 1987-12-17 | 1987-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0195726U true JPH0195726U (ja) | 1989-06-26 |
Family
ID=31483234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19237287U Pending JPH0195726U (ja) | 1987-12-17 | 1987-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0195726U (ja) |
-
1987
- 1987-12-17 JP JP19237287U patent/JPH0195726U/ja active Pending