JPH0195731U - - Google Patents
Info
- Publication number
- JPH0195731U JPH0195731U JP1987192234U JP19223487U JPH0195731U JP H0195731 U JPH0195731 U JP H0195731U JP 1987192234 U JP1987192234 U JP 1987192234U JP 19223487 U JP19223487 U JP 19223487U JP H0195731 U JPH0195731 U JP H0195731U
- Authority
- JP
- Japan
- Prior art keywords
- cap
- plasma processing
- relief
- hole
- sealing means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Safety Valves (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987192234U JPH0195731U (it) | 1987-12-18 | 1987-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987192234U JPH0195731U (it) | 1987-12-18 | 1987-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0195731U true JPH0195731U (it) | 1989-06-26 |
Family
ID=31483101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987192234U Pending JPH0195731U (it) | 1987-12-18 | 1987-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0195731U (it) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6223583A (ja) * | 1985-07-24 | 1987-01-31 | Anelva Corp | リリ−フバルブ |
-
1987
- 1987-12-18 JP JP1987192234U patent/JPH0195731U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6223583A (ja) * | 1985-07-24 | 1987-01-31 | Anelva Corp | リリ−フバルブ |