JPH0197229U

JPH0197229U -

Info

Publication number: JPH0197229U
Application number: JP19202087U
Authority: JP
Priority date: 1987-12-19
Filing date: 1987-12-19
Publication date: 1989-06-28
Anticipated expiration: 2002-12-19
Also published as: JPH086275Y2

Description

[Brief explanation of drawings]

第１図は本考案による静電容量式荷重センサの
１実施例を示す側面図、第２図は第１図の分解斜
視図、第３図は恒弾性合金の特性図、第４図は本
考案による他の実施例を示す側面図、第５図は、
第４図の斜視図、第６図は従来例を示す側面図、
第７図は第６図の分解斜視図である。１，１ａ，１０１……絶縁性固定基板、２，２
ａ……可動基板（恒弾性合金）、１０２……絶縁
性可動基板、３，３ａ，１０３，１０３′……電
極部、３１，３１ａ，１０６，１０６′……電極
取出部、３２，１０７，１０７′……端子部、４
……スルホール部、４１……中空穴、５，１０４
……シール部材、１０５……中空穴、７……凸部
分、８……グリース、２１，２１ａ……段差部分
、２２，２２ａ……円周部分。 Fig. 1 is a side view showing one embodiment of the capacitive load sensor according to the present invention, Fig. 2 is an exploded perspective view of Fig. 1, Fig. 3 is a characteristic diagram of a constant modulus alloy, and Fig. 4 is a book of the present invention. A side view showing another embodiment according to the invention, FIG.
Fig. 4 is a perspective view, Fig. 6 is a side view showing a conventional example,
FIG. 7 is an exploded perspective view of FIG. 6. 1, 1a, 101... Insulating fixed substrate, 2, 2
a...Movable substrate (constant elastic alloy), 102...Insulating movable substrate, 3, 3a, 103, 103'... Electrode part, 31, 31a, 106, 106'... Electrode extraction part, 32, 107, 107'...terminal section, 4
...Through hole part, 41...Hollow hole, 5,104
... Seal member, 105 ... Hollow hole, 7 ... Convex portion, 8 ... Grease, 21, 21a ... Step portion, 22, 22a ... Circumferential portion.

Claims

[Claims for Utility Model Registration] (1) Consisting of a fixed electrode formed on a fixed substrate made of an insulating material, and a movable electrode made of a metal material placed opposite to the fixed electrode at a predetermined interval,
A capacitor formed by passing a through hole from a predetermined position of the fixed electrode toward the back surface of the fixed substrate, and connecting the fixed electrode to a lead extraction pattern wired on the back surface of the fixed substrate via the through hole. Type load sensor. (2) The through hole is a hollow hole whose side wall is covered with a conductive material.
Capacitive load sensor as described in section. (3) The movable electrode is made of a constant-modulus alloy, and a stepped portion is processed in a region facing the fixed electrode.
Capacitive load sensor as described in section. (4) Utility model registration claims 1 to 3, in which a convex region is provided in the outer circumferential portion of the fixed substrate at a position where a predetermined clearance dimension is added to the outer dimension of the movable electrode. capacitive load sensor. (5) The capacitive load sensor according to claim 4, wherein grease for airtight sealing is applied to the gap between the convex region on the fixed substrate and the peripheral edge of the movable electrode.