JPH0197343A - Manufacture of impregnated type cathode - Google Patents
Manufacture of impregnated type cathodeInfo
- Publication number
- JPH0197343A JPH0197343A JP25499487A JP25499487A JPH0197343A JP H0197343 A JPH0197343 A JP H0197343A JP 25499487 A JP25499487 A JP 25499487A JP 25499487 A JP25499487 A JP 25499487A JP H0197343 A JPH0197343 A JP H0197343A
- Authority
- JP
- Japan
- Prior art keywords
- scandium
- cathode
- impregnated
- carbonate
- alkaline earth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】 [発明の目的コ (産業上の利用分野) この発明は、含浸型陰極の製造方法に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a method for manufacturing an impregnated cathode.
(従来の技術)
一般に、含浸型陰極は第1図に示すように構成され、陰
極支持筒1と、この陰極支持筒1内に配設され埋込材2
により固定されたヒータ3と、陰極支持筒1の一端に埋
込材2に接してろう材4により接合され電子放射物質が
含浸された陰極基体5とからなっている。(Prior Art) In general, an impregnated cathode is constructed as shown in FIG.
and a cathode base 5 which is bonded to one end of the cathode support cylinder 1 by a brazing material 4 in contact with an embedding material 2 and impregnated with an electron emitting substance.
このような含浸型陰極の製造に当たっては、タングステ
ン、モリブデン等の高融点金属の単体又は混合粉末を高
温真空中或いは水素中で焼結した多孔質体に、切削加工
をよくするために、銅又はプラスチックを含浸し、その
状態で所望の形状に切削加工する。更に、所定の操作で
切削前に含浸した銅又はプラスチックを除去した後、所
望モル比に混合した電子放射物質を多孔質の陰極基体5
上に高周波水素炉中で溶解含浸したものが良く知られて
いる。In manufacturing such an impregnated cathode, a porous body made by sintering single or mixed powder of high-melting point metals such as tungsten and molybdenum in a high-temperature vacuum or in hydrogen is mixed with copper or copper in order to improve machining. It is impregnated with plastic and then cut into the desired shape. Furthermore, after removing the copper or plastic impregnated before cutting by a predetermined operation, the porous cathode substrate 5 is filled with an electron emitting material mixed in a desired molar ratio.
It is well known that the above-mentioned material is dissolved and impregnated in a high-frequency hydrogen furnace.
又、最近では、動作温度を下げ、更に高電流密度で長時
間良好な電子放射を得るために、電子放射物質に酸化ス
カンジウムを含有せしめた陰極が開発されている(特開
昭58−154131号公報)。Recently, a cathode containing scandium oxide as an electron emitting material has been developed in order to lower the operating temperature and obtain good electron emission for a long time at a higher current density (Japanese Patent Application Laid-open No. 154131/1983). Public bulletin).
この含浸型陰極は、タングステン粉末と酸化スカンジウ
ムとの混合体をプレス加工した後、1700℃程度の温
度で焼結し、所要の形状に切削加工を行ない、この陰極
基体にB a O,Ca O。This impregnated cathode is made by pressing a mixture of tungsten powder and scandium oxide, sintering it at a temperature of about 1700°C, and cutting it into the desired shape. .
Al2O3等の電子放射物質を含浸せしめることにより
得られる。It can be obtained by impregnating it with an electron emitting substance such as Al2O3.
(発明が解決しようとする問題点)
ところが、上記の含浸型陰極は、酸化スカンジウムを含
有しないものに比較して、電子放射特性は向上するが、
次のような欠点を有している。(Problems to be Solved by the Invention) However, although the impregnated cathode described above has improved electron emission characteristics compared to one that does not contain scandium oxide,
It has the following drawbacks.
■スカンジウム及びその化合物は非常に高価であり、陰
極基体を焼結した後の切削加工により失われるスカンジ
ウムは、経済的に不利である。(2) Scandium and its compounds are very expensive, and the loss of scandium during cutting after sintering the cathode substrate is economically disadvantageous.
■酸化スカンジウムは粉砕しにくいため、均一な粒度分
布にならず、焼結体内部の酸化スカンジウム濃度にムラ
が生じる。この結果、長時間に亘り安定な動作をさせる
ことが困難である。■Since scandium oxide is difficult to crush, it does not have a uniform particle size distribution, resulting in uneven concentration of scandium oxide inside the sintered body. As a result, it is difficult to operate stably over a long period of time.
この発明は、以」二のような従来のスカンジウムを含有
する含浸型陰極の持つ不都合を解消し、特に高電流密度
で長時間動作をさせても、電子放射特性の安定した低価
格の含浸型陰極が得られる含浸型陰極の製造方法を提供
することを目的とする。This invention solves the following disadvantages of conventional impregnated cathodes containing scandium, and provides a low-cost impregnated cathode with stable electron emission characteristics even when operated at high current densities for long periods of time. It is an object of the present invention to provide a method for manufacturing an impregnated cathode that yields a cathode.
[発明の構成]
(問題点を解決するための手段)
この発明は、アルカリ土類金属炭酸塩にスカンジウムを
共沈により含有せしめ、このスカンジウム入りアルカリ
土類金属炭酸塩を、多孔質高融点金属からなる陰極基体
に溶融含浸することを特徴とする含浸型陰極の製造方法
であり、上記アルカリ土類金属炭酸塩は、バリウム単塩
又はそれらの複塩である。[Structure of the Invention] (Means for Solving the Problems) This invention contains scandium in an alkaline earth metal carbonate by coprecipitation, and converts this scandium-containing alkaline earth metal carbonate into a porous high melting point metal. A method for producing an impregnated cathode, which is characterized in that the alkaline earth metal carbonate is a barium single salt or a double salt thereof.
(作用)
この発明によれば、陰極基体に含有されるスカンジウム
の分布が非常に均一となり、長時間・高電流密度で安定
な動作特性を有する含浸型陰極の製造方法を得ることが
出来る。(Function) According to the present invention, the distribution of scandium contained in the cathode substrate becomes very uniform, and it is possible to obtain a method for producing an impregnated cathode that has stable operating characteristics over a long period of time and at high current density.
(実施例)
以下、図面を参照して、この発明の一実施例を詳細に説
明する。(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
この発明の製造方法により得られる含浸型陰極は、第1
図に示したものと同様に構成されているが、製造に当た
っては、先ずタングステン粉末をプレス成型し、水素雰
囲気中で加熱焼結した多孔質タングステン体に、銅を含
浸した後、所定の陰極形状に切削し、しかる後、酸に浸
漬し、更に加熱して完全に銅を除去して陰極基体を作る
。これは、周知の一般的な方法である。The impregnated cathode obtained by the manufacturing method of the present invention has a first
The structure is similar to that shown in the figure, but in manufacturing, tungsten powder is first press-molded, then heated and sintered in a hydrogen atmosphere, the porous tungsten body is impregnated with copper, and then a predetermined cathode shape is formed. After that, it is immersed in acid and further heated to completely remove the copper, creating a cathode substrate. This is a well-known and common method.
次に、上記陰極基体に含浸する電子放射物質の製造方法
について説明する。Next, a method for manufacturing the electron emitting material to be impregnated into the cathode substrate will be described.
先ず、アルカリ土類金属硝酸塩例えば高純度の硝酸バリ
ウムを96.6重量%純水に溶解する。First, an alkaline earth metal nitrate such as high purity barium nitrate is dissolved in 96.6% by weight pure water.
この溶解液に硝酸スカンジウムを3.4重量%攪拌しな
がら溶解し、液温を95°C以上に保つ。3.4% by weight of scandium nitrate is dissolved in this solution with stirring, and the temperature of the solution is maintained at 95° C. or higher.
次に、高純度の炭酸アンモニウムを所定量純水に溶解し
、攪拌しながら65〜70℃に保持する。Next, a predetermined amount of high-purity ammonium carbonate is dissolved in pure water and maintained at 65 to 70°C while stirring.
この炭酸アンモニウム溶液を、」二記硝酸バリウムと硝
酸スカンジウムの硝酸塩液に一定の添加速度で加え、反
応させる。生成する結晶形状は、反応速度、成製縮度等
で自由にコントロールできるが、この発明では針状結晶
を得る反応条件とした。This ammonium carbonate solution is added to a nitrate solution of barium nitrate and scandium nitrate at a constant addition rate and allowed to react. The shape of the crystals produced can be freely controlled by adjusting the reaction rate, degree of shrinkage, etc., but in this invention, the reaction conditions are such that needle-shaped crystals are obtained.
炭酸アンモニウム添加終了後も、生成した結晶を熟成さ
せるために、約30分間攪拌を継続する。Even after the addition of ammonium carbonate is completed, stirring is continued for about 30 minutes in order to ripen the formed crystals.
生成した炭酸バリウムと炭酸スカンジウムの共沈炭酸塩
を静置し、上澄液を排出し、不純物が除去されるまで温
水による洗浄を繰返し、遠心脱水等の方法により脱水し
、乾燥させて白色の共沈炭酸塩を得る。このようにして
得られる炭酸塩は、バリウム98重量%、スカンジウム
2.0重量%の構成になる。The resulting co-precipitated carbonate of barium carbonate and scandium carbonate is allowed to stand, the supernatant liquid is drained, and washing with hot water is repeated until impurities are removed, dehydrated by methods such as centrifugal dehydration, and dried to form a white product. A coprecipitated carbonate is obtained. The carbonate thus obtained has a composition of 98% by weight of barium and 2.0% by weight of scandium.
次に、上記のようにして得た電子放射物質を、陰極基体
に含浸する。Next, the cathode substrate is impregnated with the electron emitting material obtained as described above.
先ず、上記で得たスカンジウムを含有する炭酸バリウム
と炭酸カルシウムと酸化アルミニウムとを4:1:1の
モル比で混合し、前処理の加熱後、陰極基体に還元性雰
囲気で加熱しながら含浸し、余剰物の除去を行なうと含
浸型陰極基体が完成する。First, the barium carbonate containing scandium obtained above, calcium carbonate, and aluminum oxide are mixed in a molar ratio of 4:1:1, and after heating for pretreatment, the mixture is impregnated into the cathode substrate while heating in a reducing atmosphere. After removing the excess material, the impregnated cathode substrate is completed.
その後、表面にIrを被覆し、熱処理してIr−W合金
層を形成する。Thereafter, the surface is coated with Ir and heat treated to form an Ir-W alloy layer.
以上の陰極基体を用い、周知の方法で陰極構体を作り、
2極管を完成させた。この2極管について長時間動作に
伴なう電子放射特性を測定した。Using the above cathode substrate, a cathode structure is made by a well-known method,
Completed the diode tube. The electron emission characteristics of this diode during long-term operation were measured.
第2図は、電流密度]、、6A/cm2で長時間動作さ
せた場合の各時間毎のパルスエミッション比(%)を示
すものである。同図中に示す実線Xはこの発明を用いた
場合、点線Yは従来の陰極(タングステン粉末に5重量
%酸化スカンジウムを混合し、プレス後、焼結したもの
)の場合である。FIG. 2 shows the pulse emission ratio (%) for each time when the device is operated for a long time at a current density of 6 A/cm 2 . The solid line X shown in the figure shows the case when the present invention is used, and the dotted line Y shows the case when a conventional cathode (tungsten powder mixed with 5% by weight scandium oxide, pressed and sintered) is used.
この特性曲線図が示す通り、この発明の含浸型陰極は、
高電流密度での長時間動作による電子放射特性の劣化が
、非常に少ないことか明らかである。パルスエミッショ
ンの劣化が非常に少ないことは、高い安定した電子放射
能力を長時間維持出来ることを意味している。As this characteristic curve diagram shows, the impregnated cathode of the present invention is
It is clear that the deterioration of electron emission characteristics due to long-time operation at high current density is extremely small. Very little deterioration of pulse emission means that high and stable electron emission ability can be maintained for a long time.
尚、上記実施例では、炭酸バリウムに炭酸スカンジウム
を2.0重量%含有せしめたものについて説明したが、
発明者の実験によれば、含有量0.1〜5.0重量%の
範囲で同様の効果が得られる。In the above example, barium carbonate containing 2.0% by weight of scandium carbonate was explained.
According to the inventor's experiments, similar effects can be obtained within a content range of 0.1 to 5.0% by weight.
含有スカンジウム量が5重量%以上になると、初期の電
子放射特性を安定させるまでに長時間を要し、量産性に
問題があり、スカンジウムの使用量も増えて経済的にも
不都合が生じ、実用範囲ではなかった。又、0.1重量
%以下になると、長時間動作での安定性に問題が生じた
。If the amount of scandium contained exceeds 5% by weight, it will take a long time to stabilize the initial electron emission characteristics, which will cause problems in mass production, and the amount of scandium used will increase, causing economic disadvantage, making it difficult to put into practical use. It wasn't the range. Further, when the content was less than 0.1% by weight, a problem occurred in stability during long-term operation.
又、この発明は、上記のようにアルカリ土類金属炭酸塩
にスカンジウムを共沈により含有せしめ、このスカンジ
ウム入りアルカリ土類金属炭酸塩を、多孔質高融点金属
からなる陰極基体に溶融含浸する点景外は、周知の製造
方法を採用しているので、詳細な説明は省略する。Further, the present invention includes the steps of incorporating scandium into an alkaline earth metal carbonate by coprecipitation as described above, and melting and impregnating this scandium-containing alkaline earth metal carbonate into a cathode substrate made of a porous high melting point metal. Since Keigai employs a well-known manufacturing method, detailed explanation will be omitted.
(変形例)
上記実施例では、炭酸バリウムと炭酸スカンジウムの共
沈電子放射物質について説明したが、炭酸力ルシムウム
と炭酸スカンジウムの共沈、又は炭酸バリウム、炭酸力
ルシムウム、炭酸スカンジウムの3共沈を用いても、上
記実施例と同様の効果を示すことは説明するまでもない
。。(Modified example) In the above example, the coprecipitated electron-emitting material of barium carbonate and scandium carbonate was explained, but the coprecipitation of lucium carbonate and scandium carbonate, or the triple coprecipitation of barium carbonate, lucium carbonate, and scandium carbonate is also possible. It goes without saying that even if used, the same effect as in the above embodiment will be obtained. .
[発明の効果コ
この発明によれば、スカンジウム硝酸塩とアルカリ土類
金属硝酸塩との混合液を炭酸アルカリ例えば炭酸アンモ
ニウム、炭酸ナトリウム溶液と反応させ、スカンジウム
を電子放射物質である少なくともバリウムを含むアルカ
リ土類金属炭酸塩の結晶内部に含有させ、その後で陰極
基体に含浸させている。[Effects of the Invention] According to the present invention, a mixture of scandium nitrate and alkaline earth metal nitrate is reacted with an alkali carbonate such as ammonium carbonate or sodium carbonate solution, and scandium is reacted with an alkaline earth containing at least barium, which is an electron emitting substance. It is contained inside the metal carbonate crystal, and then impregnated into the cathode substrate.
このため、電子放射特性に有効なバリウムスカンデート
の生成が、確実・容易であり、陰極基体内で均−且つ有
効に行なわれ、高電流密度での長時間動作でも、電子放
射特性の劣化が少ない。For this reason, barium scandate, which is effective in improving electron emission characteristics, is reliably and easily generated, and is uniformly and effectively produced within the cathode substrate, and the electron emission characteristics do not deteriorate even during long-term operation at high current densities. few.
又、従来のスカンジウム含有型陰極は、酸化スカンジウ
ム粉体を用いているため、その粒度により陰極基体内の
スカンジウム濃度分布が左右されていたが、この発明は
電子放射物質結晶内に予め含有させているため、スカン
ジウムの濃度分布にムラがなく、非常に均一である。Furthermore, since conventional scandium-containing cathodes use scandium oxide powder, the scandium concentration distribution within the cathode substrate is affected by the particle size of the scandium oxide powder. Therefore, the concentration distribution of scandium is very uniform.
第1図は一般的な含浸型陰極を示す断面図、第2図は含
浸型陰極における動作時間と電子放射特性の関係を示す
特性曲線図である。
1・・・陰極支持筒、2・・・埋込材、3・・・ヒータ
、4・・・ろう材、5・・・陰極基体。
= 10−FIG. 1 is a sectional view showing a general impregnated cathode, and FIG. 2 is a characteristic curve diagram showing the relationship between operating time and electron emission characteristics in the impregnated cathode. DESCRIPTION OF SYMBOLS 1... Cathode support cylinder, 2... Embedding material, 3... Heater, 4... Brazing material, 5... Cathode base body. = 10-
Claims (2)
より含有せしめ、このスカンジウム入りアルカリ土類金
属炭酸塩を、多孔質高融点金属からなる陰極基体に溶融
含浸することを特徴とする含浸型陰極の製造方法。(1) An impregnated cathode characterized by containing scandium in an alkaline earth metal carbonate by coprecipitation, and melting and impregnating the scandium-containing alkaline earth metal carbonate into a cathode substrate made of a porous high melting point metal. manufacturing method.
、バリウム単塩又はそれらの複塩である特許請求の範囲
第1項記載の含浸型陰極の製造方法。(2) The method for producing an impregnated cathode according to claim 1, wherein the scandium-containing alkaline earth metal carbonate is a barium single salt or a double salt thereof.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25499487A JPH0719532B2 (en) | 1987-10-09 | 1987-10-09 | Method for manufacturing impregnated cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25499487A JPH0719532B2 (en) | 1987-10-09 | 1987-10-09 | Method for manufacturing impregnated cathode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0197343A true JPH0197343A (en) | 1989-04-14 |
| JPH0719532B2 JPH0719532B2 (en) | 1995-03-06 |
Family
ID=17272733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25499487A Expired - Lifetime JPH0719532B2 (en) | 1987-10-09 | 1987-10-09 | Method for manufacturing impregnated cathode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719532B2 (en) |
-
1987
- 1987-10-09 JP JP25499487A patent/JPH0719532B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719532B2 (en) | 1995-03-06 |
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