JPH0197555U - - Google Patents
Info
- Publication number
- JPH0197555U JPH0197555U JP19431587U JP19431587U JPH0197555U JP H0197555 U JPH0197555 U JP H0197555U JP 19431587 U JP19431587 U JP 19431587U JP 19431587 U JP19431587 U JP 19431587U JP H0197555 U JPH0197555 U JP H0197555U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- substrate storage
- storage box
- external frame
- clean air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims 1
Description
第１図および第２図はそれぞれ本考案の一実施
例の外観を示す斜視図およびその遮光扉の断面図
、第３図は従来の半導体基板収納棚の外観を示す
斜視図である。
１…外部枠体、２…高性能除塵過器、４…遮
光扉、３…半導体基板収納箱、４ａ，４ｂ，４ｃ
…遮光板、５…流風口。
1 and 2 are a perspective view showing the appearance of an embodiment of the present invention and a sectional view of its light-shielding door, and FIG. 3 is a perspective view showing the appearance of a conventional semiconductor substrate storage shelf. 1... External frame body, 2... High performance dust remover, 4... Light shielding door, 3... Semiconductor substrate storage box, 4a, 4b, 4c
...Light shielding plate, 5...Flower opening.
Claims (1)
切る半導体基板収納箱と、前記外部枠体の下段部
に設けられ前記半導体基板収納箱に常時清浄風を
送り込む送風機および除塵波器と、前記半導体
基板収納箱の前面に鎧重ね遮光板を配置して取付
けられ前記清浄風を常時一定方向に流出せしめる
遮光扉とを備えることを特徴とする半導体基板収
納棚。 an external frame, a semiconductor substrate storage box that partitions the external frame into a plurality of shelf boxes, and a blower and a dust remover that are provided in the lower part of the external frame and constantly send clean air into the semiconductor substrate storage box. A semiconductor substrate storage shelf comprising: a light-shielding door attached to the front surface of the semiconductor substrate storage box with an armor-layered light-shielding plate arranged thereon to allow the clean air to flow out in a constant direction at all times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19431587U JPH0197555U (en) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19431587U JPH0197555U (en) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0197555U true JPH0197555U (en) | 1989-06-29 |
Family
ID=31485047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19431587U Pending JPH0197555U (en) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0197555U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013125957A (en) * | 2011-12-16 | 2013-06-24 | Mitsubishi Electric Corp | Wafer cooling storage |
| JP2013187264A (en) * | 2012-03-06 | 2013-09-19 | Shin Etsu Polymer Co Ltd | Substrate storage container |
-
1987
- 1987-12-21 JP JP19431587U patent/JPH0197555U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013125957A (en) * | 2011-12-16 | 2013-06-24 | Mitsubishi Electric Corp | Wafer cooling storage |
| JP2013187264A (en) * | 2012-03-06 | 2013-09-19 | Shin Etsu Polymer Co Ltd | Substrate storage container |