JPH0197555U - - Google Patents
Info
- Publication number
- JPH0197555U JPH0197555U JP19431587U JP19431587U JPH0197555U JP H0197555 U JPH0197555 U JP H0197555U JP 19431587 U JP19431587 U JP 19431587U JP 19431587 U JP19431587 U JP 19431587U JP H0197555 U JPH0197555 U JP H0197555U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- substrate storage
- storage box
- external frame
- clean air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims 1
Description
第１図および第２図はそれぞれ本考案の一実施
例の外観を示す斜視図およびその遮光扉の断面図
、第３図は従来の半導体基板収納棚の外観を示す
斜視図である。 １…外部枠体、２…高性能除塵過器、４…遮
光扉、３…半導体基板収納箱、４ａ，４ｂ，４ｃ
…遮光板、５…流風口。
例の外観を示す斜視図およびその遮光扉の断面図
、第３図は従来の半導体基板収納棚の外観を示す
斜視図である。 １…外部枠体、２…高性能除塵過器、４…遮
光扉、３…半導体基板収納箱、４ａ，４ｂ，４ｃ
…遮光板、５…流風口。
Claims (1)
- 外部枠体と、前記外部枠体を複数個の棚箱に仕
切る半導体基板収納箱と、前記外部枠体の下段部
に設けられ前記半導体基板収納箱に常時清浄風を
送り込む送風機および除塵波器と、前記半導体
基板収納箱の前面に鎧重ね遮光板を配置して取付
けられ前記清浄風を常時一定方向に流出せしめる
遮光扉とを備えることを特徴とする半導体基板収
納棚。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19431587U JPH0197555U (ja) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19431587U JPH0197555U (ja) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0197555U true JPH0197555U (ja) | 1989-06-29 |
Family
ID=31485047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19431587U Pending JPH0197555U (ja) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0197555U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013125957A (ja) * | 2011-12-16 | 2013-06-24 | Mitsubishi Electric Corp | ウエハ冷却保管庫 |
| JP2013187264A (ja) * | 2012-03-06 | 2013-09-19 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
-
1987
- 1987-12-21 JP JP19431587U patent/JPH0197555U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013125957A (ja) * | 2011-12-16 | 2013-06-24 | Mitsubishi Electric Corp | ウエハ冷却保管庫 |
| JP2013187264A (ja) * | 2012-03-06 | 2013-09-19 | Shin Etsu Polymer Co Ltd | 基板収納容器 |