JPH0198162U - - Google Patents
Info
- Publication number
- JPH0198162U JPH0198162U JP19248387U JP19248387U JPH0198162U JP H0198162 U JPH0198162 U JP H0198162U JP 19248387 U JP19248387 U JP 19248387U JP 19248387 U JP19248387 U JP 19248387U JP H0198162 U JPH0198162 U JP H0198162U
- Authority
- JP
- Japan
- Prior art keywords
- target
- magnetron cathode
- coaxial magnetron
- grid
- magnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011295 pitch Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の実施例の一部切欠要部正断面
図、第２図は第１図の―断面図、第３図は第
一の従来の技術例の説明図、第４図は第二の従来
の技術例の説明図である。
１……ターゲツト、２……磁石、３……グリツ
ド、３ａ……導電棒、３ｂ……支持環、５……支
持円筒、６……密封槽、６ａ……貫通孔。
Fig. 1 is a partially cutaway front sectional view of an embodiment of the present invention, Fig. 2 is a cross-sectional view of Fig. 1, Fig. 3 is an explanatory diagram of the first conventional technique, and Fig. 4 is FIG. 2 is an explanatory diagram of a second conventional technical example. DESCRIPTION OF SYMBOLS 1... Target, 2... Magnet, 3... Grid, 3a... Conductive rod, 3b... Support ring, 5... Support cylinder, 6... Sealed tank, 6a... Through hole.
Claims (1)
ゲツトの長手方向に間隔を有して配設されてなる
同軸マグネトロンカソードにおいて、前記ターゲ
ツトの外周を囲撓する上下に長い複数の導電棒を
所定ピツチに備えたグリツドを配設したことを特
徴とする同軸マグネトロンカソード。 In a coaxial magnetron cathode in which a plurality of magnets are arranged inside a cylindrical target at intervals in the longitudinal direction of the target, a plurality of vertically long conductive rods surrounding the outer periphery of the target are arranged at predetermined pitches. A coaxial magnetron cathode characterized by the provision of a grid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19248387U JPH0198162U (en) | 1987-12-17 | 1987-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19248387U JPH0198162U (en) | 1987-12-17 | 1987-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0198162U true JPH0198162U (en) | 1989-06-30 |
Family
ID=31483340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19248387U Pending JPH0198162U (en) | 1987-12-17 | 1987-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0198162U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962385A (en) * | 1972-10-20 | 1974-06-17 |
-
1987
- 1987-12-17 JP JP19248387U patent/JPH0198162U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962385A (en) * | 1972-10-20 | 1974-06-17 |
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